Abstract: The three-dimensional standard vibrator based on the aerostatic gas-floating decoupling device contains a base. The base is installed with a X axis vibrator, a X axis return mechanism, a Y axis vibrator, a Y axis return mechanism, a Z axis vibrator, and a three-dimensional vibration platform. The X axis vibrator and the X axis return mechanism are both installed along X axis but separated by the three-dimensional vibration platform. The Y axis vibrator and the Y axis return mechanism are both installed along Y axis but also separated by the three-dimensional vibration platform. There are two aerostatic gas-floating plates corresponding to the vibrator and connecting to the X axis and Y axis vibrators, respectively. Two intervals used to generate gas films are formed between the two aerostatic gas-floating plates and the three-dimensional vibrator, respectively. The X axis and Y axis return mechanisms both consist of a reset spring and an aerostatic gas-floating plate corresponding to the spring.

Abstract: The three-dimensional standard vibrator based on leaf-spring-type decoupling device contains a base set with three single-dimensional vibrators (along X, Y and Z axes, respectively) and a three-dimensional vibration platform. The X axis vibrator is connected with the three-dimensional vibration platform through X axis decoupling device, the Y axis vibrator is connected with the three-dimensional vibration platform through Y axis decoupling device, and the Z axis vibrator is connected with the three-dimensional vibration platform through Z axis decoupling device. The properties of the three-dimensional vibrator are as follow. X axis decoupling device, Y axis decoupling device and Z axis decoupling device are all comprised of supporting-spring units. Each of the supporting-spring units contains a pair of leaf springs mounted parallel with each other and the first and second connecting components mounted on the two edges of the leaf springs.

Abstract: The three-dimensional standard vibrator based on leaf-spring-type decoupling device contains a base set with three single-dimensional vibrators (along X, Y and Z axes, respectively) and a three-dimensional vibration platform. The X axis vibrator is connected with the three-dimensional vibration platform through X axis decoupling device, the Y axis vibrator is connected with the three-dimensional vibration platform through Y axis decoupling device, and the Z axis vibrator is connected with the three-dimensional vibration platform through Z axis decoupling device. The properties of the three-dimensional vibrator are as follow. X axis decoupling device, Y axis decoupling device and Z axis decoupling device are all comprised of supporting-spring units. Each of the supporting-spring units contains a pair of leaf springs mounted parallel with each other and the first and second connecting components mounted on the two edges of the leaf springs.

Abstract: The three-dimensional standard vibrator based on the aerostatic gas-floating decoupling device contains a base. The base is installed with a X axis vibrator, a X axis return mechanism, a Y axis vibrator, a Y axis return mechanism, a Z axis vibrator, and a three-dimensional vibration platform. The X axis vibrator and the X axis return mechanism are both installed along X axis but separated by the three-dimensional vibration platform. The Y axis vibrator and the Y axis return mechanism are both installed along Y axis but also separated by the three-dimensional vibration platform. There are two aerostatic gas-floating plates corresponding to the vibrator and connecting to the X axis and Y axis vibrators, respectively. Two intervals used to generate gas films are formed between the two aerostatic gas-floating plates and the three-dimensional vibrator, respectively. The X axis and Y axis return mechanisms both consist of a reset spring and an aerostatic gas-floating plate corresponding to the spring.