Patents by Inventor Xugang Xiong
Xugang Xiong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20240103386Abstract: An apparatus for determining a condition associated with a pellicle for use in a lithographic apparatus, the apparatus including a sensor, wherein the sensor is configured to measure a property associated with the pellicle, the property being indicative of the pellicle condition.Type: ApplicationFiled: October 3, 2023Publication date: March 28, 2024Applicants: ASML NETHERLANDS B.V., ASML HOLDING N.V.Inventors: Derk Servatius Gertruda BROUNS, Joshua ADAMS, Aage BENDIKSEN, Richard JACOBS, Andrew JUDGE, Veera Venkata Narasimha Narendra Phani KOTTAPALLI, Joseph Harry LYONS, Theodorus Marinus MODDERMAN, Manish RANJAN, Marcus Adrianus VAN DE KERKHOF, Xugang XIONG
-
Patent number: 11906907Abstract: An apparatus for determining a condition associated with a pellicle for use in a lithographic apparatus, the apparatus including a sensor, wherein the sensor is configured to measure a property associated with the pellicle, the property being indicative of the pellicle condition.Type: GrantFiled: November 27, 2018Date of Patent: February 20, 2024Assignees: ASML NETHERLANDS B.V., ASML HOLDING N.V.Inventors: Derk Servatius Gertruda Brouns, Joshua Adams, Aage Bendiksen, Richard Jacobs, Andrew Judge, Veera Venkata Narasimha Narendra Phani Kottapalli, Joseph Harry Lyons, Theodorus Marinus Modderman, Manish Ranjan, Marcus Adrianus Van De Kerkhof, Xugang Xiong
-
Publication number: 20200341366Abstract: An apparatus for determining a condition associated with a pellicle for use in a lithographic apparatus, the apparatus including a sensor, wherein the sensor is configured to measure a property associated with the pellicle, the property being indicative of the pellicle condition.Type: ApplicationFiled: November 27, 2018Publication date: October 29, 2020Applicants: ASML NETHERLANDS B.V., ASML HOLDING N.V.Inventors: Derk Servatius Gertruda BROUNS, Joshua ADAMS, Aage BENDIKSEN, Richard JACOBS, Andrew JUDGE, Veera Venkata Narasimha Narendra Phani KOTTAPALLI, Joseph Harry LYONS, Theodorus Marinus MODDERMAN, Manish RANJAN, Marcus Adrianus VAN DE KERKHOF, Xugang XIONG
-
Patent number: 9457947Abstract: An apparatus and a method to hold a patterning device configured to impart a beam of radiation with a pattern in its cross-section. The apparatus includes a base configured to support the patterning device and an inner cover couplable to the base. The inner cover includes a restraining mechanism that, upon an application of a force external to the inner cover, is configured to provide an in-plane force to the patterning device to restrain movement of the patterning device, the in-plane force being substantially parallel to a patterning surface of the patterning device.Type: GrantFiled: October 12, 2012Date of Patent: October 4, 2016Assignee: ASML HOLDING N.V.Inventors: Robert Gabriël Maria Lansbergen, Peter C. Kochersperger, David Ramirez, Xugang Xiong, George Hilary Harrold, Arindam Sinharoy
-
Patent number: 9117601Abstract: A non-volatile bistable nano-electromechanical switch is provided for use in memory devices and microprocessors. The switch employs carbon nanotubes as the actuation element. A method has been developed for fabricating nanoswitches having one single-walled carbon nanotube as the actuator. The actuation of two different states can be achieved using the same low voltage for each state.Type: GrantFiled: December 26, 2013Date of Patent: August 25, 2015Assignee: Northeastern UniversityInventors: Sivasubramanian Somu, Ahmed Busnaina, Nicol McGruer, Peter Ryan, George G. Adams, Xugang Xiong, Taehoon Kim
-
Publication number: 20140202860Abstract: A non-volatile bistable nano-electromechanical switch is provided for use in memory devices and microprocessors. The switch employs carbon nanotubes as the actuation element. A method has been developed for fabricating nanoswitches having one single-walled carbon nanotube as the actuator. The actuation of two different states can be achieved using the same low voltage for each state.Type: ApplicationFiled: December 26, 2013Publication date: July 24, 2014Applicant: Northeastern UniversityInventors: Sivasubramanian Somu, Ahmed Busnaina, Nicol McGruer, Peter Ryan, George G. Adams, Xugang Xiong, Taehoon Kim
-
Patent number: 8784673Abstract: Methods for fabricating templates for nanoelement assembly and methods for fluid-guided assembly of nanoelements are provided. Templates are fabricated by plasma modification of surface hydrophilicity and production of a network of hydrophobic trenches having a hydrophilic bottom surface. Single-walled carbon nanotubes (SWNT) can be assembled into stable films, ribbons, and wires of nanoscale thickness and nanoscale or microscale width and length. The nanofilm assemblies prepared according to the invention are highly conductive and can be used in the fabrication of a wide variety of microscale and nanoscale electronic devices.Type: GrantFiled: November 16, 2009Date of Patent: July 22, 2014Assignee: Northeastern UniversityInventors: Xugang Xiong, Laila Jaberansari, Ahmed Busnaina, Yung Joon Jung, Sivasubramanian Somu, Moneesh Upmanyu
-
Patent number: 8637356Abstract: A non-volatile bistable nano-electromechanical switch is provided for use in memory devices and microprocessors. The switch employs carbon nanotubes as the actuation element. A method has been developed for fabricating nanoswitches having one single-walled carbon nanotube as the actuator. The actuation of two different states can be achieved using the same low voltage for each state.Type: GrantFiled: June 27, 2012Date of Patent: January 28, 2014Assignee: Northeastern UniversityInventors: Sivasubramanian Somu, Ahmed Busnaina, Nicol McGruer, Peter Ryan, George G. Adams, Xugang Xiong, Taehoon Kim
-
Publication number: 20130100430Abstract: An apparatus and a method to hold a patterning device configured to impart a beam of radiation with a pattern in its cross-section. The apparatus includes a base configured to support the patterning device and an inner cover couplable to the base. The inner cover includes a restraining mechanism that, upon an application of a force external to the inner cover, is configured to provide an in-plane force to the patterning device to restrain movement of the patterning device, the in-plane force being substantially parallel to a patterning surface of the patterning device.Type: ApplicationFiled: October 12, 2012Publication date: April 25, 2013Applicant: ASML HOLDING N.V.Inventors: Robert Gabriël Maria LANSBERGEN, Peter C. KOCHERSPERGER, David RAMIREZ, Xugang XIONG, Hilary HARROLD, Arindam SINHAROY
-
Patent number: 8362618Abstract: An assembly of nanoelements forms a three-dimensional nanoscale circuit interconnect for use in microelectronic devices. A process for producing the circuit interconnect includes using dielectrophoresis by applying an electrical field across a gap between vertically displaced non-coplanar microelectrodes in the presence of a liquid suspension of nanoelements such as nanoparticles or single-walled carbon nanotubes to form a nanoelement bridge connecting the microelectrodes. The assembly process can be carried out at room temperature, is compatible with conventional semiconductor fabrication, and has a high yield. The current-voltage curves obtained from the nanoelement bridge demonstrate that the assembly is functional with a resistance of ?40 ohms for gold nanoparticles. The method is suitable for making high density three-dimensional circuit interconnects, vertically integrated nanosensors, and for in-line testing of manufactured conductive nanoelements.Type: GrantFiled: November 8, 2007Date of Patent: January 29, 2013Assignee: Northeastern UniversityInventors: Ahmed Busnaina, Mehmet R. Dokmeci, Nishant Khanduja, Selvapraba Selvarasah, Xugang Xiong, Prashanth Makaram, Chia-Ling Chen
-
Publication number: 20120267223Abstract: A non-volatile bistable nano-electromechanical switch is provided for use in memory devices and microprocessors. The switch employs carbon nanotubes as the actuation element. A method has been developed for fabricating nanoswitches having one single-walled carbon nanotube as the actuator. The actuation of two different states can be achieved using the same low voltage for each state.Type: ApplicationFiled: June 27, 2012Publication date: October 25, 2012Applicant: NORTHEASTERN UNIVERSITYInventors: Sivasubramanian Somu, Ahmed Busnaina, Nicol McGruer, Peter Ryan, George G. Adams, Xugang Xiong, Taehoon Kim
-
Patent number: 8211765Abstract: A non-volatile bistable nano-electromechanical switch is provided for use in memory devices and microprocessors. The switch employs carbon nanotubes as the actuation element. A method has been developed for fabricating nanoswitches having one single-walled carbon nanotube as the actuator. The actuation of two different states can be achieved using the same low voltage for each state.Type: GrantFiled: September 9, 2011Date of Patent: July 3, 2012Assignee: Northeastern UniversityInventors: Sivasubramanian Somu, Ahmed Busnaina, Nicol McGruer, Peter Ryan, George G. Adams, Xugang Xiong, Taehoon Kim
-
Publication number: 20120052649Abstract: A non-volatile bistable nano-electromechanical switch is provided for use in memory devices and microprocessors. The switch employs carbon nanotubes as the actuation element. A method has been developed for fabricating nanoswitches having one single-walled carbon nanotube as the actuator. The actuation of two different states can be achieved using the same low voltage for each state.Type: ApplicationFiled: September 9, 2011Publication date: March 1, 2012Applicant: NORTHEASTERN UNIVERSITYInventors: Sivasubramanian Somu, Ahmed Busnaina, Nicol McGruer, Peter Ryan, George G. Adams, Xugang Xiong, Taehoon Kim
-
Patent number: 8031514Abstract: A non-volatile bistable nano-electromechanical switch is provided for use in memory devices and microprocessors. The switch employs carbon nanotubes as the actuation element. A method has been developed for fabricating nanoswitches having one single-walled carbon nanotube as the actuator. The actuation of two different states can be achieved using the same low voltage for each state.Type: GrantFiled: April 9, 2008Date of Patent: October 4, 2011Assignee: Northeastern UniversityInventors: Sivasubramanian Somu, Ahmed Busnaina, Nicol McGruer, Peter Ryan, George G. Adams, Xugang Xiong, Taehoon Kim
-
Publication number: 20100183844Abstract: Methods for fabricating templates for nanoelement assembly and methods for fluid-guided assembly of nanoelements are provided. Templates are fabricated by plasma modification of surface hydrophilicity and production of a network of hydrophobic trenches having a hydrophilic bottom surface. Single-walled carbon nanotubes (SWNT) can be assembled into stable films, ribbons, and wires of nanoscale thickness and nanoscale or microscale width and length. The nanofilm assemblies prepared according to the invention are highly conductive and can be used in the fabrication of a wide variety of microscale and nanoscale electronic devices.Type: ApplicationFiled: November 16, 2009Publication date: July 22, 2010Inventors: Xugang Xiong, Laila Jaberansari, Ahmed Busnaina, Yung Joon Jung, Sivasubramanian Somu, Moneesh Upmanyu
-
Publication number: 20100116631Abstract: A non-volatile bistable nano-electromechanical switch is provided for use in memory devices and microprocessors. The switch employs carbon nanotubes as the actuation element. A method has been developed for fabricating nanoswitches having one single-walled carbon nanotube as the actuator. The actuation of two different states can be achieved using the same low voltage for each state.Type: ApplicationFiled: April 9, 2008Publication date: May 13, 2010Applicant: NORTHEASTERN UNIVERSITYInventors: Sivasubramanian Somu, Ahmed Busnaina, Nicol McGruer, Peter Ryan, George G. Adams, Xugang Xiong, Taehoon Kim
-
Publication number: 20100038794Abstract: An assembly of nanoelements forms a three-dimensional nanoscale circuit interconnect for use in microelectronic devices. A process for producing the circuit interconnect includes using dielectrophoresis by applying an electrical field across a gap between vertically displaced non-coplanar microelectrodes in the presence of a liquid suspension of nanoelements such as nanoparticles or single-walled carbon nanotubes to form a nanoelement bridge connecting the microelectrodes. The assembly process can be carried out at room temperature, is compatible with conventional semiconductor fabrication, and has a high yield. The current-voltage curves obtained from the nanoelement bridge demonstrate that the assembly is functional with a resistance of ?40 ohms for gold nanoparticles. The method is suitable for making high density three-dimensional circuit interconnects, vertically integrated nanosensors, and for in-line testing of manufactured conductive nanoelements.Type: ApplicationFiled: November 8, 2007Publication date: February 18, 2010Applicant: NORTHEASTERN UNIVERSITYInventors: Ahmed Busnaina, Mehmet R. Dokmeci, Nishant Khanduja, Selvapraba Selvarasah, Xugang Xiong, Prashanth Makaram, Chia-Ling Chen