Patents by Inventor Xujiang He

Xujiang He has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MICRO-ELECTROMECHANICAL DEVICES AND METHODS OF FABRICATING THEREOF
    Publication number: 20100019623
    Abstract: An electromechanical device includes a support structure formed by attaching inner surfaces of second and third substrates to a first substrate. The support structure includes at least one cavity between the second and third layers. An electromechanical active element is provided on an outer surface of at least one of the second or third layers.
    Type: Application
    Filed: October 5, 2009
    Publication date: January 28, 2010
    Applicants: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH, SONY CORPORATION
    Inventors: Kui Yao, Xiao Song Eric Tang, Jian Zhang, Santiranjan Shannigrahi, Peng Gao, Xujiang HE
  • Micro-electromechanical devices and methods of fabricating thereof
    Patent number: 7596841
    Abstract: An electromechanical device includes a support structure formed by attaching inner surfaces of second and third substrates to a first substrate. The support structure includes at least one cavity between the second and third layers. An electromechanical active element is provided on an outer surface of at least one of the second or third layers.
    Type: Grant
    Filed: April 23, 2004
    Date of Patent: October 6, 2009
    Assignees: Agency for Science Technology and Research, Sony Corporation
    Inventors: Kui Yao, Xiao Song Eric Tang, Peng Gao, Xujiang He, Jian Zhang, Santiranjan Shannigrahi
  • Micro-electromechanical device
    Publication number: 20070164634
    Abstract: An electromechanical device includes a support structure formed by attaching inner surfaces of second and third substrates to a first substrate. The support structure includes at least one cavity between the second and third layers. An electromechanical active element is provided on an outer surface of at least one of the second or third layers.
    Type: Application
    Filed: April 23, 2004
    Publication date: July 19, 2007
    Applicants: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH, SONY CORPORATION
    Inventors: Kui Yao, Xiao Song Tang, Peng Gao, Xujiang He, Jian Zhang, Santiranjan Shannigrahi
  • Micromachined electromechanical device
    Patent number: 7208806
    Abstract: A method for fabricating a MEMS device comprises providing a substrate having a back side, a front side opposite to the back side and a periphery portion. A desired microstructure is formed on the back side of the substrate. The substrate is then supported for rotation. A precursor solution is deposited on the front side of the substrate during rotation so that a thin film layer may be formed thereon. During formation of the thin film layer, the substrate is supported and rotated that the microstructure formed on the back side is protected.
    Type: Grant
    Filed: November 14, 2005
    Date of Patent: April 24, 2007
    Assignee: Agency for Science, Technology and Research
    Inventors: Kui Yao, Xujiang He, Jian Zhang, Santiranjan Shannigrahi
  • Micromachined electromechanical device
    Publication number: 20060068564
    Abstract: A method for fabricating a MEMS device comprises providing a substrate having a back side, a front side opposite to the back side and a periphery portion. A desired microstructure is formed on the back side of the substrate. The substrate is then supported for rotation. A precursor solution is deposited on the front side of the substrate during rotation so that a thin film layer may be formed thereon. During formation of the thin film layer, the substrate is supported and rotated that the microstructure formed on the back side is protected.
    Type: Application
    Filed: November 14, 2005
    Publication date: March 30, 2006
    Inventors: Kui Yao, Xujiang He, Jian Zhang, Santiranjan Shannigrahi
  • Micromachined electromechanical device
    Patent number: 7018862
    Abstract: A method for fabricating a MEMS device comprises providing a substrate having a back side, a front side opposite to the back side and a periphery portion. A desired microstructure is formed on the back side of the substrate. The substrate is then supported for rotation. A precursor solution is deposited on the front side of the substrate during rotation so that a thin film layer may be formed thereon. During formation of the thin film layer, the substrate is supported and rotated that the microstructure formed on the back side is protected.
    Type: Grant
    Filed: July 15, 2003
    Date of Patent: March 28, 2006
    Assignee: Agency for Science, Technology and Research
    Inventors: Kui Yao, Xujiang He, Jian Zhang, Santiranjan Shannigrahi
  • Micromachined electromechanical device
    Publication number: 20050014306
    Abstract: A method for fabricating a MEMS device comprises providing a substrate having a back side, a front side opposite to the back side and a periphery portion. A desired microstructure is formed on the back side of the substrate. The substrate is then supported for rotation. A precursor solution is deposited on the front side of the substrate during rotation so that a thin film layer may be formed thereon. During formation of the thin film layer, the substrate is supported and rotated that the microstructure formed on the back side is protected.
    Type: Application
    Filed: July 15, 2003
    Publication date: January 20, 2005
    Inventors: Kui Yao, Xujiang He, Jian Zhang, Santiranjan Shannigrahi