Patents by Inventor Xun LAN

Xun LAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12781383
    Abstract: A method for producing a nitrogen-doped single crystal silicon ingot includes, after cutting a reference ingot into sample silicon wafers, selecting a plurality of silicon wafers to be tested and evaluating a distribution of defect areas in the plurality of silicon wafers, wherein the defect areas comprise any of a pure vacancy area, a pure interstitial area, and an alternating distribution area of a pure vacancy area and a pure interstitial area. The method also includes determining a distribution position of each defect area in the reference ingot based on the distribution of the defect areas in the plurality of silicon. Then, in a production process of the nitrogen-doped single crystal silicon ingot, a pulling is performed at a set target pulling speed corresponding to each defect area which refers to the distribution position of each defect area in the reference nitrogen-doped single crystal silicon ingot.
    Type: Grant
    Filed: September 29, 2022
    Date of Patent: November 3, 2026
    Assignee: XI'AN ESWIN MATERIAL TECHNOLOGY CO., LTD.
    Inventors: Xun Lan, Yang Li
  • Patent number: 12183616
    Abstract: A method is for positioning a center of a V-type notch of a wafer. The method includes: determining, based on collected edge data of a V-type notch of a wafer, a center of a concentric circle corresponding to edges of the V-type notch; and judging, based on a position relation between the center and a set reference scale line, whether the V-type notch is at a preset target center position. The method also includes determining, based on the position relation between the center and the set reference scale line, a rotation direction and rotation angle of the wafer when the V-type notch is out of the preset target center position; and driving, according to the rotation direction and rotation angle of the wafer, the wafer to rotate until the V-type notch is rotated to the preset target center position.
    Type: Grant
    Filed: October 21, 2022
    Date of Patent: December 31, 2024
    Assignees: XI'AN ESWIN MATERIAL TECHNOLOGY CO., LTD., XI'AN ESWIN SILICON WAFER TECHNOLOGY CO., LTD.
    Inventors: Leilei Wang, Xun Lan, Housheng Li
  • Publication number: 20240287704
    Abstract: A method for producing a nitrogen-doped single crystal silicon ingot includes, after cutting a reference ingot into sample silicon wafers, selecting a plurality of silicon wafers to be tested and evaluating a distribution of defect areas in the plurality of silicon wafers, wherein the defect areas comprise any of a pure vacancy area, a pure interstitial area, and an alternating distribution area of a pure vacancy area and a pure interstitial area. The method also includes determining a distribution position of each defect area in the reference ingot based on the distribution of the defect areas in the plurality of silicon. Then, in a production process of the nitrogen-doped single crystal silicon ingot, a pulling is performed at a set target pulling speed corresponding to each defect area which refers to the distribution position of each defect area in the reference nitrogen-doped single crystal silicon ingot.
    Type: Application
    Filed: September 29, 2022
    Publication date: August 29, 2024
    Inventors: Xun LAN, Yang LI
  • Publication number: 20240266198
    Abstract: A method is for positioning a center of a V-type notch of a wafer. The method includes: determining, based on collected edge data of a V-type notch of a wafer, a center of a concentric circle corresponding to edges of the V-type notch; and judging, based on a position relation between the center and a set reference scale line, whether the V-type notch is at a preset target center position. The method also includes determining, based on the position relation between the center and the set reference scale line, a rotation direction and rotation angle of the wafer when the V-type notch is out of the preset target center position; and driving, according to the rotation direction and rotation angle of the wafer, the wafer to rotate until the V-type notch is rotated to the preset target center position.
    Type: Application
    Filed: October 21, 2022
    Publication date: August 8, 2024
    Inventors: Leilei WANG, Xun LAN, Housheng LI