Patents by Inventor Xusheng Kevin Wu

Xusheng Kevin Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods, apparatus and system for forming wrap-around contact with dual silicide
    Patent number: 10236218
    Abstract: At least one method, apparatus and system disclosed herein involves forming semiconductor devices comprising dual silicides in contacts to FinFETs. The semiconductor device may comprise a PFET fin; an NFET fin; a first metal silicide around the NFET fin; a second metal silicide around the PFET fin; and a fill metal around the second metal silicide, above the PFET fin, and above the NFET fin. Methods of forming such devices are also disclosed.
    Type: Grant
    Filed: February 20, 2018
    Date of Patent: March 19, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Ruilong Xie, Julien Frougier, Hiroaki Niimi, Nigel Cave, Xusheng Kevin Wu