Patents by Inventor Y-Chih Lo

Y-Chih Lo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • RF coil design for improved film uniformity of an ion metal plasma source
    Publication number: 20050098427
    Abstract: The present disclosure provides a system and method for providing improved film uniformity from an ion metal plasma source. The system includes a deposition chamber and a coil. The coil is comprised of a first metal and includes opposite terminal ends disposed within the deposition chamber. At least one of the opposite terminal ends of the coil is angled less than ninety degrees.
    Type: Application
    Filed: November 11, 2003
    Publication date: May 12, 2005
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jui-Mu Cho, Wen-Cheng Yang, Wen-Jung Yang, Y-Chih Lo, Tay-Lang Huang, Te-Hung Hsieh