Abstract: A doubly clamped beam has an asymmetric piezoelectric layer within the beam with a gate proximate to the beam within a submicron distance with a gate and beam dipole. A suspended beam is formed using a Cl2/He plasma etch supplied at a flow rate ratio of 1:9 respectively into a plasma chamber. A parametric amplifier comprises a NEMS signal beam driven at resonance and a pair of pump beams driven at twice resonance to generate a modulated Lorentz force on the pump beams to perturb the spring constant of the signal beam. A bridge circuit provides two out-of-phase components of an excitation signal to a first and second NEMS beam in a first and second arm. A DC current is supplied to an AC driven NEMS device to tune the resonant frequency.

Abstract: The density of a spray plume generated by an aerosol delivery system (“ADS”) may be characterised by illuminating a face of the plume with light and then imaging the plume. The shape of the plume may be characterised by operating the ADS in a controlled manner to form a first spray plume. A face of the plume is illuminated and the plume imaged from a first side parallel to the spray axis of the plume. The ADS is then again operated in the controlled manner to form a second spray plume. A face of the second plume is illuminated and the second plume imaged from a second side which is parallel to the spray axis of the plume and perpendicular to the first side.