Patents by Inventor Ya-Pai Yeh

Ya-Pai Yeh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Laser ablation technique using in IC etching process
    Publication number: 20030136769
    Abstract: The present invention relates to a method of laser technology using in IC etching process, which uses by controlling the power of laser, repetition rate, timing of operation and modulation of laser beam's focus to apply in IC etching process to ablate the various materials on the surface of a wafer.
    Type: Application
    Filed: January 23, 2002
    Publication date: July 24, 2003
    Inventors: Yue-Yeh Lin, Shu-Ping Chen, Ya-Pai Yeh