Patents by Inventor Ya-Ping Su

Ya-Ping Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming a semiconductor device comprising top conductive pads
    Patent number: 10964653
    Abstract: A method for making a semiconductor device is disclosed. A substrate comprising semiconductor device elements is provided. A top conductive pad and an anti-reflective coating are patterned over the substrate. The anti-reflective coating is disposed on the top conductive pad. At least one passivation film is formed over the substrate and the anti-reflective coating. The at least one passivation film and the anti-reflective coating are etched to form a trench therein so as to expose a portion of the top conductive pad.
    Type: Grant
    Filed: June 8, 2018
    Date of Patent: March 30, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ya-Ping Su, Han-Wen Fung, Chia-Chi Chung, Chih-Hsien Hsu, Chun Yan Chen, Chien-Sheng Wu, Tien-Chih Huang, Wei-Da Chen, Chien-Hua Tseng
  • METHOD OF FORMING A SEMICONDUCTOR DEVICE COMPRISING TOP CONDUCTIVE PADS
    Publication number: 20190096831
    Abstract: A method for making a semiconductor device is disclosed. A substrate comprising semiconductor device elements is provided. A top conductive pad and an anti-reflective coating are patterned over the substrate. The anti-reflective coating is disposed on the top conductive pad. At least one passivation film is formed over the substrate and the anti-reflective coating. The at least one passivation film and the anti-reflective coating are etched to form a trench therein so as to expose a portion of the top conductive pad.
    Type: Application
    Filed: June 8, 2018
    Publication date: March 28, 2019
    Inventors: Ya-Ping Su, Han-Wen Fung, Chia-Chi Chung, Chih-Hsien Hsu, Chun Yan Chen, Chien-Sheng Wu, Tien-Chih Huang, Wei-Da Chen, Chien-Hua Tseng