Abstract: The present disclosure provides a magnetron sputtering apparatus, including a process chamber, a bias power supply assembly, and an excitation power supply assembly. The process chamber is provided with a base assembly and a bias guide assembly. A target is arranged at a top of the process chamber. The base assembly is arranged at a bottom of the process chamber and is configured to support a wafer carrier, drive the wafer carrier to move, and heat the wafer carrier. The bias guide assembly is arranged at the base assembly and configured to support the wafer carrier. The bias guide assembly is electrically in contact with the wafer carrier. The bias power supply assembly is electrically connected to the bias guide assembly and configured to apply a bias voltage to the wafer carrier through the bias guide assembly.

Abstract: A wideband terahertz modulator based on gradual openings, which belongs to the technical field of electromagnetic functional devices, includes: a semiconductor substrate; an epitaxial layer provided on the semiconductor substrate; a modulation units array, a positive voltage loading electrode and a negative voltage loading electrode which are provided on the epitaxial layer; wherein each modulation unit in the modulation units array comprises a disconnected H-shaped structure, a metal electrode located below an end of the opening of the disconnected H-shaped structure, and a semiconductor doped heterostructure located below the opening of the disconnected H-shaped structure; wherein in the disconnected H-shaped structures, adjacent modulation units have different opening positions; in a same row, the opening positions are linearly distributed and have a certain slope, and inclination slopes of the opening positions of two adjacent rows are opposite.

Abstract: An elevator door interlock assembly and an elevator system. The elevator door interlock assembly includes: a first base plate on which a common rotating shaft is arranged; a first hanging wheel, which is pivotally connected to the first base plate through the common rotating shaft and guides the first base plate to reciprocate in an opening and closing direction of an elevator door; and a first lock arm, a middle part of which is pivotally connected to the first base plate through the common rotating shaft, so as to rotate between a locked position and a released position when the elevator door is closed.

Abstract: An elevator door interlock assembly and an elevator system. The elevator door interlock assembly includes: a first base plate on which a common rotating shaft is arranged; a first hanging wheel, which is pivotally connected to the first base plate through the common rotating shaft and guides the first base plate to reciprocate in an opening and closing direction of an elevator door; and a first lock arm, a middle part of which is pivotally connected to the first base plate through the common rotating shaft, so as to rotate between a locked position and a released position when the elevator door is closed.

Abstract: A high-electron mobility transistor (HEMT) array terahertz wave modulator loaded in a waveguide is provided, which belongs to the technical field of electromagnetic functional devices and focuses on fast dynamic functional devices in the terahertz band. The device comprises a waveguide cavity and a modulation chip. The modulation chip comprises a semiconductor material substrate, a heterostructure material epitaxial layer, an artificial microstructure, and a socket circuit. The applied voltage controls the distribution change of the two-dimensional electron gas in the HEMT, which in turn controls the resonance mode conversion in the artificial microstructure, thereby control the transmission of electromagnetic waves in the waveguide. The modulator has a modulation depth of up to 96% and a modulation rate above 2 GHz.

Abstract: A cholinesterase inhibitor polymorph, wherein specifically disclosed are a octahydroaminoacridine succinate polymorph, a corresponding crystal composition and pharmaceutical composition, and applications thereof. The compound octahydroaminoacridine succinate is used for screening and studying polymorphs, and the discovered polymorphs are appraised and evaluated; crystal forms having better physical and chemical properties are determined for subsequent development and study, and crystal forms having good stability and an excellent therapeutic effect are obtained.

Abstract: An in-cavity cleaning method includes: a lower electrode temperature control step of controlling a lower electrode to a predetermined temperature; an electrode distance adjustment step of elevating the lower electrode and controlling a distance between an upper electrode and the lower electrode; a film deposition step of depositing a film on a substrate; a cleaning gas introducing step of introducing a cleaning gas in a plasma state from the upper electrode; and a cleaning gas pressure control step of adjusting a pressure of the cleaning gas in a cavity by adjusting an opening of a valve.

Abstract: This application relates to an apparatus, a system, and a method for impedance adjustment of a processing station. An apparatus for impedance adjustment of a single processing station may include: a heating plate including a first grounding grid and a second grounding grid, where the first grounding grid and the second grounding grid cover different areas of the heating plate; a first tuner connected to the first grounding grid and including a first adjustable capacitor and a first sensor for detecting a current; and a second tuner connected to the second grounding grid and including a second adjustable capacitor and a second sensor for detecting a current.

Abstract: A high-electron mobility transistor (HEMT) array terahertz wave modulator loaded in a waveguide is provided, which belongs to the technical field of electromagnetic functional devices and focuses on fast dynamic functional devices in the terahertz band. The device comprises a waveguide cavity and a modulation chip. The modulation chip comprises a semiconductor material substrate, a heterostructure material epitaxial layer, an artificial microstructure, and a socket circuit. The applied voltage controls the distribution change of the two-dimensional electron gas in the HEMT, which in turn controls the resonance mode conversion in the artificial microstructure, thereby control the transmission of electromagnetic waves in the waveguide. The modulator has a modulation depth of up to 96% and a modulation rate above 2 GHz. The invention can be realized by using micro-processing technology, and the preparation process is mature and reliable.

Abstract: A wideband terahertz modulator based on gradual openings, which belongs to the technical field of electromagnetic functional devices, includes: a semiconductor substrate; an epitaxial layer provided on the semiconductor substrate; a modulation units array, a positive voltage loading electrode and a negative voltage loading electrode which are provided on the epitaxial layer; wherein each modulation unit in the modulation units array comprises a disconnected H-shaped structure, a metal electrode located below an end of the opening of the disconnected H-shaped structure, and a semiconductor doped heterostructure located below the opening of the disconnected H-shaped structure; wherein in the disconnected H-shaped structures, adjacent modulation units have different opening positions; in a same row, the opening positions are linearly distributed and have a certain slope, and inclination slopes of the opening positions of two adjacent rows are opposite.

Abstract: The present invention discloses an accurate and efficient modeling method for the terahertz branch waveguide directional coupler, which uses mode matching method (MMM) to take into account the effects on the coupler field distribution caused by the branch structure discontinuity, combines odd and even mode analysis method to further simplify the derivation process, and finally obtains a simplified and accurate calculation formula of the coupling degree, which the latter produces a new conclusion that when the work frequency of the branch waveguide directional coupler is determined, the coupling degree thereof is determined by the sum of the branch widths. The modeling method of the present invention has the characteristics of simplicity, which can greatly shorten the modeling time and improve the efficiency of the modeling compared with the traditional modeling method. In addition, the modeling method has the characteristics of universality.

Abstract: The present invention relates to a hydraulic bushing, including a main spring and a cylindrical outer housing. The main spring comprising: a core shaft; a first rubber body arranged on an outer wall of the core shaft, wherein two liquid chambers diametrically opposite to and spaced from each other are formed on the first rubber body, each liquid chamber extending throughout the first rubber body along an axial direction thereof; and a sleeve mounted on an outer wall of the first rubber body, a groove being formed in an outer wall of the sleeve. The main spring is disposed inside an inner chamber of the outer housing, and a flow channel for connecting the two liquid chambers with each other is formed between the outer housing and the sleeve through the groove.

Abstract: A terahertz wave fast modulator based on coplanar waveguide combining with transistor is disclosed. The terahertz waves are inputted through a straight waveguide structure, and then are coupled through a probe structure onto a core part of the present invention, which includes a suspended coplanar waveguide structure and a modulation unit with high electron mobility transistor, wherein the suspended coplanar waveguide structure is formed by three metal wires and a semiconductor substrate; and the modulation unit with high electron mobility transistor is located between adjacent metal transmission strips of the coplanar waveguide structure. Transmission characteristics of the terahertz waves in the coplanar waveguide structure are changed through the switching on/off of the modulation unit, so as to fast modulate the amplitudes and phases of the terahertz waves, and finally the modulated terahertz waves are transmitted through a probe—waveguide structure.

Abstract: Disclosed is a hydraulic bushing and a rail vehicle. The hydraulic bushing comprises: a core shaft; a sleeve mounted on the core shaft, wherein a first rubber body is filled in a space formed between the core shaft and the sleeve, and a groove is provided on an outer surface of the sleeve; and an outer housing, which is mounted on the sleeve through press fit. Two liquid chambers for accommodating liquids are provided diametrically opposite to each other on the first rubber body, and the groove and the outer housing together define a flow channel, through which the two liquid chambers communicate with each other. Use of the hydraulic bushing on the rail vehicle not only can assure stable operation of the vehicle in a straight running state thereof, but also can reduce abrasion of a wheel and a rail in a curve running state.

Abstract: The present invention relates to a hydraulic bushing, including a main spring and a cylindrical outer housing. The main spring comprising: a core shaft; a first rubber body arranged on an outer wall of the core shaft, wherein two liquid chambers diametrically opposite to and spaced from each other are formed on the first rubber body, each liquid chamber extending throughout the first rubber body along an axial direction thereof; and a sleeve mounted on an outer wall of the first rubber body, a groove being formed in an outer wall of the sleeve. The main spring is disposed inside an inner chamber of the outer housing, and a flow channel for connecting the two liquid chambers with each other is formed between the outer housing and the sleeve through the groove. The hydraulic bushing not only can assure stable operation of the vehicle in a straight running state, but also can reduce abrasion of a wheel and a rail in a curve running state.

Abstract: Disclosed is a hydraulic bushing and a rail vehicle. The hydraulic bushing comprises: a core shaft; a sleeve mounted on the core shaft, wherein a first rubber body is filled in a space formed between the core shaft and the sleeve, and a groove is provided on an outer surface of the sleeve; and an outer housing, which is mounted on the sleeve through press fit. Two liquid chambers for accommodating liquids are provided diametrically opposite to each other on the first rubber body, and the groove and the outer housing together define a flow channel, through which the two liquid chambers communicate with each other. Use of the hydraulic bushing on the rail vehicle not only can assure stable operation of the vehicle in a straight running state thereof, but also can reduce abrasion of a wheel and a rail in a curve running state.

Abstract: A spatial terahertz wave phase modulator based on the high electron mobility transistor is provided. The phase modulator combines the quick-response high electron mobility transistor with a novel metamaterial resonant structure, so as to rapidly modulate terahertz wave phases in a free space. The phase modulator includes a semiconductor substrate, an HEMT epitaxial layer, a periodical metamaterial resonant structure and a muff-coupling circuit. A concentration of 2-dimensional electron gas in the HEMT epitaxial layer is controlled through loading voltage signals, so as to change an electromagnetic resonation mode of the metamaterial resonant structure, thereby achieving phase modulation of terahertz waves. The phase modulator has a phase modulation depth of over 90 degrees within a large bandwidth, and a maximum phase modulation depth is about 140 degrees. Furthermore, the phase modulator is simple in structure, easy to machine, high in modulation speed, convenient to use, and easy to package.

Abstract: A terahertz wave fast modulator based on coplanar waveguide combining with transistor is disclosed. The terahertz waves are inputted through a straight waveguide structure, and then are coupled through a probe structure onto a core part of the present invention, which includes a suspended coplanar waveguide structure and a modulation unit with high electron mobility transistor, wherein the suspended coplanar waveguide structure is formed by three metal wires and a semiconductor substrate; and the modulation unit with high electron mobility transistor is located between adjacent metal transmission strips of the coplanar waveguide structure. Transmission characteristics of the terahertz waves in the coplanar waveguide structure are changed through the switching on/off of the modulation unit, so as to fast modulate the amplitudes and phases of the terahertz waves, and finally the modulated terahertz waves are transmitted through a probe—waveguide structure.

Abstract: A spatial terahertz wave phase modulator based on the high electron mobility transistor is provided. The phase modulator combines the quick-response high electron mobility transistor with a novel metamaterial resonant structure, so as to rapidly modulate terahertz wave phases in a free space. The phase modulator includes a semiconductor substrate, an HEMT epitaxial layer, a periodical metamaterial resonant structure and a muff-coupling circuit. A concentration of 2-dimensional electron gas in the HEMT epitaxial layer is controlled through loading voltage signals, so as to change an electromagnetic resonation mode of the metamaterial resonant structure, thereby achieving phase modulation of terahertz waves. The phase modulator has a phase modulation depth of over 90 degrees within a large bandwidth, and a maximum phase modulation depth is about 140 degrees. Furthermore, the phase modulator is simple in structure, easy to machine, high in modulation speed, convenient to use, and easy to package.

Abstract: Terahertz external modulator based on high electron mobility transistors belongs to the field of electromagnetic functional devices technology. This invention includes the semiconductor substrate (1), the epitaxial layer (2), and the modulation-unit array (4). The epitaxial layer (2) is set on the semiconductor substrate (1). The modulation-unit (4), the positive electrode (3), and the negative electrode (5) are all set on the epitaxial layer (2). The modulation-unit array includes at least three units with each of them is composed of high electron mobility transistors and metamaterial-structure. The gates of transistors connect to the negative electrode (5), and the sources and drains connect to the positive electrode (3). This invention is used for manipulation of spatial transmission terahertz waves. It could be operated at room temperatures, normal pressures, and non-vacuum condition. It does not need to load on the waveguide, thus is easy to package and use.