Patents by Inventor Yaacov Legerbaum
Yaacov Legerbaum has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11749551Abstract: A chuck includes a chuck surface, a plurality of vacuum ports being distributed over the chuck surface. Each of the vacuum ports is open to a conduit that is connectable to a suction source that is operable to apply suction to that vacuum port. A flow restrictor is located within each conduit and is characterized by a flow resistance. The flow resistance of the flow restrictor in at least one conduit is less than the flow resistance of the flow restrictor in at least one other conduit.Type: GrantFiled: February 8, 2021Date of Patent: September 5, 2023Assignee: Core Flow Ltd.Inventors: Boaz Nishri, Ami Herman, Nir Gurarye, Yaacov Legerbaum, Igor Birger, Alon Segal, Mart Genender, Ronen Lautman
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Publication number: 20220250168Abstract: A chuck includes a chuck surface, a plurality of vacuum ports being distributed over the chuck surface. Each of the vacuum ports is open to a conduit that is connectable to a suction source that is operable to apply suction to that vacuum port. A flow restrictor is located within each conduit and is characterized by a flow resistance. The flow resistance of the flow restrictor in at least one conduit is less than the flow resistance of the flow restrictor in at least one other conduit.Type: ApplicationFiled: May 4, 2021Publication date: August 11, 2022Applicant: Core Flow Ltd.Inventors: Boaz NISHRI, Ami Herman, Nir Gurarye, Yaacov Legerbaum, Igor Birger, Alon Segal, Mart Genender, Ronen Lautman
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Publication number: 20220250167Abstract: A chuck includes a chuck surface, a plurality of vacuum ports being distributed over the chuck surface. Each of the vacuum ports is open to a conduit that is connectable to a suction source that is operable to apply suction to that vacuum port. A flow restrictor is located within each conduit and is characterized by a flow resistance. The flow resistance of the flow restrictor in at least one conduit is less than the flow resistance of the flow restrictor in at least one other conduit.Type: ApplicationFiled: February 8, 2021Publication date: August 11, 2022Applicant: Core Flow Ltd.Inventors: Boaz NISHRI, Ami HERMAN, Nir GURARYE, Yaacov LEGERBAUM, Igor BIRGER, Alon SEGAL, Mart GENENDER, Ronen LAUTMAN
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Publication number: 20220177249Abstract: A web tension device includes a pressure source and a stationary housing. A translatable unit is translatable into and out of a cavity of the housing and includes an inlet that is connectable to the pressure source. A distal end of the translatable unit includes a tensioning surface with openings to enable outflow of pressurized fluid to apply a pushing force to a web in a roll-to-roll process. Proximal openings enable outflow of the fluid into a gap between the housing and the translatable unit. When tension of the web is reduced, an outward force that is exerted by pressure in the gap pushes the translatable unit outward, pushing the web outward until an inward force that is exerted by the web balances the outward force. When tension of the web increases, the inward force pushes the translatable unit inward until the inward force is balanced by the outward force.Type: ApplicationFiled: March 8, 2020Publication date: June 9, 2022Applicant: Core Flow Ltd.Inventors: Alon SEGAL, Yaacov LEGERBAUM, Eric JOELI, Ronen LAUTMAN
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Publication number: 20220181191Abstract: A wafer positioning device includes at least one fixed stop that is positioned at a periphery of a clamped position on a surface of a chuck and an extendible finger. A finger extension mechanism extends the finger outward toward a center of the chuck surface, and retracts the finger away from the center of the chuck surface. The finger is configured, when a wafer is placed on the chuck surface and the finger extension mechanism is operated to extend the finger outward, to push the wafer laterally toward the fixed stop until an edge of the wafer contacts the fixed stop when a distal end of the finger is at the periphery of the clamped position.Type: ApplicationFiled: March 11, 2020Publication date: June 9, 2022Applicant: Core Flow Ltd.Inventors: Alon SEGAL, Daniel YAHIDES, Yaacov LEGERBAUM
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Patent number: 10513011Abstract: A noncontact support system includes a table with a port layer having a pattern of interspersed pressure ports and vacuum ports. A pressure conduit layer includes a grid pattern of pressure conduits, connectable to a pressure source, each of the pressure ports being located on an axis passing through an intersection of at least two of the pressure conduits and substantially orthogonal to the grid pattern of pressure conduits. A vacuum conduit layer includes a grid pattern of vacuum conduits, connectable to a suction source, each of the vacuum ports being located on an axis passing through an intersection of at least two of the vacuum conduits and substantially orthogonal to the grid pattern of vacuum conduits. The grid pattern of vacuum conduits is laterally offset from the grid pattern of pressure conduits such that each intersection of pressure conduits is laterally offset from all intersections of the vacuum conduits.Type: GrantFiled: November 8, 2017Date of Patent: December 24, 2019Assignee: Core Flow Ltd.Inventors: Yaacov Legerbaum, Ronen Lautman, Leonid Nosovsky, Boaz Nishri
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Publication number: 20190134785Abstract: A noncontact support system includes a table with a port layer having a pattern of interspersed pressure ports and vacuum ports. A pressure conduit layer includes a grid pattern of pressure conduits, connectable to a pressure source, each of the pressure ports being located on an axis passing through an intersection of at least two of the pressure conduits and substantially orthogonal to the grid pattern of pressure conduits. A vacuum conduit layer includes a grid pattern of vacuum conduits, connectable to a suction source, each of the vacuum ports being located on an axis passing through an intersection of at least two of the vacuum conduits and substantially orthogonal to the grid pattern of vacuum conduits. The grid pattern of vacuum conduits is laterally offset from the grid pattern of pressure conduits such that each intersection of pressure conduits is laterally offset from all intersections of the vacuum conduits.Type: ApplicationFiled: November 8, 2017Publication date: May 9, 2019Applicant: Core Flow Ltd.Inventors: Yaacov LEGERBAUM, Ronen LAUTMAN, Leonid NOSOVSKY, Boaz NISHRI
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Publication number: 20190055097Abstract: A vacuum wheel for transporting a substrate includes a fixed conduit that is connectable to a suction source. A vacuum surface on a circumference of the vacuum wheel includes vacuum openings that are distributed around the circumference, such that rotation of the wheel causes the vacuum openings to successively fluidically connect to the fixed conduit. When suction is applied to the fixed conduit, suction is applied to one or more of the vacuum openings that are currently fluidically connected to the fixed conduit. At least one contact surface on the circumference of the vacuum wheel is adjacent to, and extends outward beyond, the vacuum surface. When suction is applied to the vacuum openings, the substrate is drawn toward the vacuum surface so as to contact the contact surface without contacting the vacuum surface, creating a friction force that enables transport of the substrate when the wheel rotates.Type: ApplicationFiled: August 15, 2017Publication date: February 21, 2019Applicant: Core Flow Ltd.Inventors: Alon SEGAL, Yaacov Legerbaum
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Patent number: 10189661Abstract: A vacuum wheel for transporting a substrate includes a fixed conduit that is connectable to a suction source. A vacuum surface on a circumference of the vacuum wheel includes vacuum openings that are distributed around the circumference, such that rotation of the wheel causes the vacuum openings to successively fluidically connect to the fixed conduit. When suction is applied to the fixed conduit, suction is applied to one or more of the vacuum openings that are currently fluidically connected to the fixed conduit. At least one contact surface on the circumference of the vacuum wheel is adjacent to, and extends outward beyond, the vacuum surface. When suction is applied to the vacuum openings, the substrate is drawn toward the vacuum surface so as to contact the contact surface without contacting the vacuum surface, creating a friction force that enables transport of the substrate when the wheel rotates.Type: GrantFiled: August 15, 2017Date of Patent: January 29, 2019Assignee: Core Flow Ltd.Inventors: Alon Segal, Yaacov Legerbaum