Patents by Inventor Yaacov Zak

Yaacov Zak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Focus error correction system and method
    Patent number: 7760928
    Abstract: A method for focus error corrections. The method includes: determining a focus scheme in response to: a spatial relationship between an upper surface of at least a first portion of a substantially transparent upper layer of an inspected object and between an upper surface of at least a first portion of a reflective layer of the inspected object; wherein the reflective layer is positioned below the transparent upper layer, and a position of at least one height differentiated narrow feature of inspected object; wherein during a scan of each height differentiated narrow feature a focus error signal change rate well exceeds a focus correction rate of a focus error correction unit; and applying the focus scheme while scanning at least a portion of the inspected object.
    Type: Grant
    Filed: October 17, 2006
    Date of Patent: July 20, 2010
    Assignee: Applied Materials Israel, Ltd.
    Inventors: Tuvia-Dror Kutscher, Yaacov Zak, Rami Elishai, Erez Fridman
  • FOCUS ERROR CORRECTION SYSTEM AND METHOD
    Publication number: 20080089617
    Abstract: A method for focus error corrections. The method includes: determining a focus scheme in response to: a spatial relationship between an upper surface of at least a first portion of a substantially transparent upper layer of an inspected object and between an upper surface of at least a first portion of a reflective layer of the inspected object; wherein the reflective layer is positioned below the transparent upper layer, and a position of at least one height differentiated narrow feature of inspected object; wherein during a scan of each height differentiated narrow feature a focus error signal change rate well exceeds a focus correction rate of a focus error correction unit; and applying the focus scheme while scanning at least a portion of the inspected object.
    Type: Application
    Filed: October 17, 2006
    Publication date: April 17, 2008
    Inventors: Tuvia-Dror Kutscher, Yaacov Zak, Rami Elishai, Erez Fridman