Abstract: A laser radar system apparatus for the multi-wavelength measurement of the atmospheric carbon dioxide concentration and a vertical aerosol profile, including: a laser transmitting unit; a dual-pulse laser capable of simultaneously transmitting laser having three wavelengths, i.e., 1572 nm, 1064 nm, and 532 nm; a transmitting beam expander; a receiving telescope system; a visual axis monitoring module; a photoelectric detection unit; and a data acquisition and processing unit. The laser that simultaneously outputs laser having three wavelengths is used in a laser radar system, and an optical differential absorption method and a high spectral resolution detection method are used, such that the atmospheric carbon dioxide concentration and the vertical aerosol profile can be measured simultaneously and high-precision aerosol monitoring is implemented during the high-precision obtaining of the concentration of the greenhouse gas carbon dioxide.

Abstract: A laser radar system apparatus for the multi-wavelength measurement of the atmospheric carbon dioxide concentration and a vertical aerosol profile, including: a laser transmitting unit; a dual-pulse laser capable of simultaneously transmitting laser having three wavelengths, i.e., 1572 nm, 1064 nm, and 532 nm; a transmitting beam expander; a receiving telescope system; a visual axis monitoring module; a photoelectric detection unit; and a data acquisition and processing unit. The laser that simultaneously outputs laser having three wavelengths is used in a laser radar system, and an optical differential absorption method and a high spectral resolution detection method are used, such that the atmospheric carbon dioxide concentration and the vertical aerosol profile can be measured simultaneously and high-precision aerosol monitoring is implemented during the high-precision obtaining of the concentration of the greenhouse gas carbon dioxide.

Abstract: The present invention discloses a method of reducing contamination in a CVD chamber. The method comprises cleaning the CVD chamber with first cleaning gases containing NF3; removing the particles in the CVD chamber with second cleaning gases containing N2; further removing the particles in the CVD chamber with third cleaning gases containing O2; and seasoning an amorphous carbon layer with mixed gases containing C2H2 and an inert gas.

Abstract: The present invention discloses a method of reducing contamination in a CVD chamber. The method comprises cleaning the CVD chamber with first cleaning gases containing NF3; removing the particles in the CVD chamber with second cleaning gases containing N2; further removing the particles in the CVD chamber with third cleaning gases containing O2; and seasoning an amorphous carbon layer with mixed gases containing C2H2 and an inert gas.