Patents by Inventor Yakov Bienenstock

Yakov Bienenstock has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device and system for recording the motion of a wafer and a method therefrom
    Patent number: 7029930
    Abstract: The invention provides a device that can be used to record the motion of a wafer and fine perturbations and vibrations in its motion during its progress through and between semiconductor process and inspection machines in the course of the actual manufacturing process or during a test cycle of the processing or inspection machine. It also provides a system and a method which uses this record mechanical malfunction of the processing or inspection machine which has caused, or could cause, defects in the manufactured wafer whether directly or indirectly.
    Type: Grant
    Filed: December 4, 2002
    Date of Patent: April 18, 2006
    Assignee: Innersense Ltd.
    Inventors: Yigal Tomer, Yakov Bienenstock, Gershon Dorot