Patents by Inventor Yamaguchi Masashi

Yamaguchi Masashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR ACTIVATING REACTIVE OXYGEN SPECIES FOR CLEANING CARBON-BASED FILM DEPOSITION
    Publication number: 20090246399
    Abstract: A method of continuously forming carbon-based films on substrates includes: (i) forming a carbon-based film on a substrate in a reactor a pre-selected number of times; (ii) exciting an inert gas, an oxygen gas, and a nitrogen tri-fluoride gas to generate a plasma for cleaning; (iii) cleaning an inside of the reactor with the plasma after step (i) to remove particles accumulated during step (i) on the inside of the reactor.
    Type: Application
    Filed: March 28, 2008
    Publication date: October 1, 2009
    Applicant: ASM JAPAN K.K.
    Inventors: Kamal Kishore Goundar, Yamaguchi Masashi