Patents by Inventor Yamato Igarashi

Yamato Igarashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11923177
    Abstract: A plasma processing apparatus includes: a processing container having a vertical tubular shape and an opening formed in a side wall of the processing container, the processing container configured to accommodate a plurality of substrates in multiple stages; a plasma partition wall airtightly provided on an outer wall of the processing container and configured to cover the opening and define a plasma generation space; a plasma electrode provided along the plasma partition wall; and a processing gas supplier provided outside the plasma generation space and configured to supply a plasma generation gas.
    Type: Grant
    Filed: July 6, 2021
    Date of Patent: March 5, 2024
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Keiji Tabuki, Yamato Tonegawa, Kazumasa Igarashi, Kazuo Yabe
  • Patent number: 4603063
    Abstract: A galvanizing furnace comprises a plurality of burners arrayed parallel to the surface of sheet iron to be galvanized and having burner nozzles directed upwards so that flame exiting the burner nozzles forms a screen-like wall of flame opposite and parallel to the sheet iron as the sheet iron passes through the alloying furnace. Preferably, the burners are separated into a plurality of blocks which can be controlled independently.
    Type: Grant
    Filed: May 3, 1985
    Date of Patent: July 29, 1986
    Assignee: Kawaski Steel Corporation
    Inventors: Kuniaki Sato, Yasuhisa Nakajima, Yamato Igarashi