Abstract: The present invention relates to compositions and methods for preventing and reducing inflammation and preventing and treating diseases and disorders associated with inflammation. It has been shown that CRADD plays a pivotal role in maintaining the integrity of endothelial monolayers. The recombinant cell-penetrating CRADD protein (CP-CRADD)-based compositions and methods described herein provide for the development of a novel treatment for inflammatory vascular disorders including cardiovascular, cerebrovascular, respiratory, gastrointestinal, and renal systems.

Abstract: Provided is a fusion protein of human serum albumin or a wild type thereof and human interleukin-2 or a mutation thereof, said fusion protein has a significantly extended in vivo half-life relative to recombinant interleukin-2, can be used alone for treating a tumor, and improves anti-tumor efficacy of an anti-PD-1 antibody or an anti PD-L1-antibody.

Abstract: Examples of the disclosure provide a smart angled mounting piece and an angled mounting piece assembly. By providing switching units and identification circuits in the smart angled mounting piece, when one or more of the switching units are triggered by the auxiliary member, an identification circuit electrically connected to the triggered switching unit and an identification circuit electrically connected to a switching unit that is not triggered collectively generate a logic signal characterizing the position at which the electronic device is installed to the cabinet, and the logic signal is transmitted to the electronic device through the communication module. The manager may know the position of the current electronic device in real time, without the need to specifically provide position acquisition elements on the cabinet, and without the need to install a separate management system on the back-end server, simplifying the difficulty of device management.

Abstract: Examples of the disclosure provide a smart angled mounting piece and an angled mounting piece assembly. By providing switching units and identification circuits in the smart angled mounting piece, when one or more of the switching units are triggered by the auxiliary member, an identification circuit electrically connected to the triggered switching unit and an identification circuit electrically connected to a switching unit that is not triggered collectively generate a logic signal characterizing the position at which the electronic device is installed to the cabinet, and the logic signal is transmitted to the electronic device through the communication module. The manager may know the position of the current electronic device in real time, without the need to specifically provide position acquisition elements on the cabinet, and without the need to install a separate management system on the back-end server, simplifying the difficulty of device management.

Abstract: A system and method of controlling a cluster tool apparatus, wherein the cluster tool includes one or more processing modules and a robot that is configured to move a semiconductor product to and from the one or more processing modules, the cluster tool configured for processing semiconductor products. The method of controlling the cluster tool apparatus to perform a processing cycle includes receiving a plurality of system parameters from a user interface, wherein the system parameters relate to one or more processing steps of the processing cycle, determining a schedule for performing the processing cycle utilizing the one or more processing modules, wherein the schedule being determined based on a semiconductor product residency parameter.

Abstract: A first VXLAN Tunnel End Point (VTEP) determines a simulation packet for simulating a service forwarding path of a service packet forwarded from a first Virtual Machine (VM) accessing the first VTEP to a second VM accessing a second VTEP when the service packet sent by the first VM does not reach the second VM. A packet character parameter of the simulation packet is the same as a packet character parameter of the service packet. The first VTEP calculates the packet character parameter of the simulation packet to determine a User Datagram Protocol (UDP) source port number, performs VXLAN encapsulation for the simulation packet according to the determined UDP source port number and a VXLAN tunnel identity in a local register entry matching with the simulation packet, and forwards the simulation packet with the VXLAN encapsulation via a VXLAN tunnel corresponding to the VXLAN tunnel identity.

Abstract: A system and method for a cluster tool apparatus for processing a semiconductor product including processing modules located adjacent each other and configured to process a semiconductor module, loadlocks configured to retain and dispense unprocessed semiconductor products and each positioned adjacent one of the processing modules, a robot configured to load, transfer and unload a semiconductor product to and from the processing modules, a hardware controller in communication with the robot and executing a method to close down the cluster tool apparatus to an idle state, the method including determining a status of the processing modules, determining if a close down process is required based on the status or based on a close down signal, and, if required, determining a schedule for a close down process based on a semiconductor product residency parameter, and controlling the operation of the robot based on the schedule to perform the close down process.

Abstract: A method determines an optimized production schedule of a production line including a hybrid multi-cluster tool formed by a plurality of single-arm tools and dual-arm tools interconnected with each other.

Abstract: Since single and dual-arm tools behave differently, it is difficult to coordinate their activities in a hybrid multi-cluster tool that is composed of both single- and dual-arm tools. Aiming at finding an optimal one-wafer cyclic schedule for a treelike hybrid multi-cluster tool whose bottleneck tool is process-bound, the present work extends a resource-oriented Petri net to model such system. By the developed Petri net model, to find a one-wafer cyclic schedule is to determine robot waiting times. By doing so, it is shown that, for any treelike hybrid multi-cluster tool whose bottleneck tool is process-bound, there is always a one-wafer cyclic schedule. Then, computationally efficient algorithms are developed to obtain the minimal cycle time and the optimal one-wafer cyclic schedule. Examples are given to illustrate the developed method.

Abstract: A first VXLAN Tunnel End Point (VTEP) determines a simulation packet for simulating a service forwarding path of a service packet forwarded from a first Virtual Machine (VM) accessing the first VTEP to a second VM accessing a second VTEP when the service packet sent by the first VM does not reach the second VM. A packet character parameter of the simulation packet is the same as a packet character parameter of the service packet. The first VTEP calculates the packet character parameter of the simulation packet to determine a User Datagram Protocol (UDP) source port number, performs VXLAN encapsulation for the simulation packet according to the determined UDP source port number and a VXLAN tunnel identity in a local register entry matching with the simulation packet, and forwards the simulation packet with the VXLAN encapsulation via a VXLAN tunnel corresponding to the VXLAN tunnel identity.

Abstract: The scheduling problem of a multi-cluster tool with a tree topology whose bottleneck tool is process-bound is investigated. A method for scheduling the multi-cluster tool to thereby generate an optimal one-wafer cyclic schedule for this multi-cluster tool is provided. A Petri net (PN) model is developed for the multi-cluster tool by explicitly modeling robot waiting times such that a schedule is determined by setting the robot waiting times. Based on the PN model, sufficient and necessary conditions under which a one-wafer cyclic schedule exists are derived and it is shown that an optimal one-wafer cyclic schedule can be always found. Then, efficient algorithms are given to find the optimal cycle time and its optimal schedule. Examples are used to demonstrate the scheduling method.

Abstract: Recent trends of larger wafer and smaller lot sizes bring cluster tools with frequent lot switches. Practitioners must deal with more transient processes during such switches, including start-up and close-down processes. To obtain higher yield, it is necessary to shorten the duration of transient processes. Much prior effort was poured into the modeling and scheduling for the steady state of cluster tools. In the existing literature, no attention has been turned to optimize the close-down process for single-arm cluster tools with wafer residency constraints. This invention intends to do so by 1) developing a Petri net model to analyze their scheduling properties and 2) proposing Petri net-based methods to solve their close-down optimal scheduling problems under different workloads among their process steps. Industrial examples are used to illustrate the effectiveness and application of the proposed methods.

Abstract: A system and method for a cluster tool apparatus for processing a semiconductor product including processing modules located adjacent each other and configured to process a semiconductor module, loadlocks configured to retain and dispense unprocessed semiconductor products and each positioned adjacent one of the processing modules, a robot configured to load, transfer and unload a semiconductor product to and from the processing modules, a hardware controller in communication with the robot and executing a method to close down the cluster tool apparatus to an idle state, the method including determining a status of the processing modules, determining if a close down process is required based on the status or based on a close down signal, and, if required, determining a schedule for a close down process based on a semiconductor product residency parameter, and controlling the operation of the robot based on the schedule to perform the close down process.

Abstract: A system and method of controlling a cluster tool apparatus, wherein the cluster tool includes one or more processing modules and a robot that is configured to move a semiconductor product to and from the one or more processing modules, the cluster tool configured for processing semiconductor products. The method of controlling the cluster tool apparatus to perform a processing cycle includes receiving a plurality of system parameters from a user interface, wherein the system parameters relate to one or more processing steps of the processing cycle, determining a schedule for performing the processing cycle utilizing the one or more processing modules, wherein the schedule being determined based on a semiconductor product residency parameter.

Abstract: A method determines an optimized production schedule of a production line including a hybrid multi-cluster tool formed by a plurality of single-arm tools and dual-arm tools interconnected with each other.

Abstract: Due to the trend of using larger wafer diameter and smaller lot size, cluster tools need to switch from processing one lot of wafers to another frequently. It leads to more transient periods in wafer fabrication. Their efficient scheduling and control problems become more and more important. It becomes difficult to solve such problems, especially when wafer residency time constraints must be considered. This work develops a Petri net model to describe the behavior during the start-up transient processes of a single-arm cluster tool. Then, based on the model, for the case that the difference of workloads among the steps is not too large and can be properly balanced, a scheduling algorithm to find an optimal feasible schedule for the start-up process is given. For other cases schedulable at the steady state, a linear programming model is developed to find an optimal feasible schedule for the start-up process.

Abstract: Since single and dual-arm tools behave differently, it is difficult to coordinate their activities in a hybrid multi-cluster tool that is composed of both single- and dual-arm tools. Aiming at finding an optimal one-wafer cyclic schedule for a treelike hybrid multi-cluster tool whose bottleneck tool is process-bound, the present work extends a resource-oriented Petri net to model such system. By the developed Petri net model, to find a one-wafer cyclic schedule is to determine robot waiting times. By doing so, it is shown that, for any treelike hybrid multi-cluster tool whose bottleneck tool is process-bound, there is always a one-wafer cyclic schedule. Then, computationally efficient algorithms are developed to obtain the minimal cycle time and the optimal one-wafer cyclic schedule. Examples are given to illustrate the developed method.

Abstract: The scheduling problem of a multi-cluster tool with a tree topology whose bottleneck tool is process-bound is investigated. A method for scheduling the multi-cluster tool to thereby generate an optimal one-wafer cyclic schedule for this multi-cluster tool is provided. A Petri net (PN) model is developed for the multi-cluster tool by explicitly modeling robot waiting times such that a schedule is determined by setting the robot waiting times. Based on the PN model, sufficient and necessary conditions under which a one-wafer cyclic schedule exists are derived and it is shown that an optimal one-wafer cyclic schedule can be always found. Then, efficient algorithms are given to find the optimal cycle time and its optimal schedule. Examples are used to demonstrate the scheduling method.

Abstract: Recent trends of larger wafer and smaller lot sizes bring cluster tools with frequent lot switches. Practitioners must deal with more transient processes during such switches, including start-up and close-down processes. To obtain higher yield, it is necessary to shorten the duration of transient processes. Much prior effort was poured into the modeling and scheduling for the steady state of cluster tools. In the existing literature, no attention has been turned to optimize the close-down process for single-arm cluster tools with wafer residency constraints. This invention intends to do so by 1) developing a Petri net model to analyze their scheduling properties and 2) proposing Petri net-based methods to solve their close-down optimal scheduling problems under different workloads among their process steps. Industrial examples are used to illustrate the effectiveness and application of the proposed methods.

Abstract: Due to the trend of using larger wafer diameter and smaller lot size, cluster tools need to switch from processing one lot of wafers to another frequently. It leads to more transient periods in wafer fabrication. Their efficient scheduling and control problems become more and more important. It becomes difficult to solve such problems, especially when wafer residency time constraints must be considered. This work develops a Petri net model to describe the behavior during the start-up transient processes of a single-arm cluster tool. Then, based on the model, for the case that the difference of workloads among the steps is not too large and can be properly balanced, a scheduling algorithm to find an optimal feasible schedule for the start-up process is given. For other cases schedulable at the steady state, a linear programming model is developed to find an optimal feasible schedule for the start-up process.