Abstract: A memory device includes a stack structure, a channel pillar, a first conductive pillar, a second conductive pillar, a charge storage structure, a first conductive layer, a second conductive layer, and an insulating liner layer. The stack structure is located on a dielectric substrate and includes gate layers and insulating layers alternately stacked with each other. The channel pillar extends through the stack structure. The first conductive pillar and the second conductive pillar are located in and electrically connecting with the channel pillars. The charge storage structure is located between the gate layers and the channel pillar. The first conductive and the second conductive layers are located between the stack structure and the dielectric substrate. The second conductive layer is closer the channel layer than the first conductive layer. The insulating liner layer separates the second conductive layer from the channel layer and the first conductive layer.

Abstract: A memory device includes a dielectric substrate, a conductive layer, a gate stack structure, a plurality of ring-shaped slits and a plurality of inner slits. The conductive layer is located on the dielectric substrate. The gate stack structure is located on a first part of the conductive layer. The dielectric layer is located on the gate stack structure and a second part of the conductive layer. The plurality of ring-shaped slits extends through the dielectric layer, the gate stack structure and the conductive layer to define a plurality of tiles. The plurality of inner slits are arranged in the ring-shaped slits to define a plurality of blocks in each ring-shaped slit. A height of the plurality of inner slits is the same as a height of the plurality of ring-shaped slits.

Abstract: A three-dimensional AND flash memory device includes a stack structure, a channel pillar, a first conductive pillar and a second conductive pillar, and a charge storage structure. The stack structure is located on a dielectric substrate and includes gate layers and insulating layers alternately stacked with each other. The channel pillar extends through the stack structure. The first conductive pillar and the second conductive pillar are located in and electrically connected with the channel pillar. The first conductive pillar includes a first metal silicide pillar, and the second conductive pillar includes a second metal silicide pillar. The charge storage structure is located between the gate layers and the channel pillar.