Patents by Inventor Yan Rubin

Yan Rubin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • RF delivery configuration in a plasma processing system
    Patent number: 7042311
    Abstract: In one embodiment, a system for delivering radio frequency (RF) power to a plasma processing system includes an automatic impedance matching network configured to receive RF power from an RF generator, and a fixed impedance matching network coupled between the automatic impedance matching network and the plasma processing chamber. The fixed impedance matching network may be configured to transform a first impedance presented by the chamber to a second impedance that allows the automatic impedance matching network to operate within a tuning range.
    Type: Grant
    Filed: October 10, 2003
    Date of Patent: May 9, 2006
    Assignee: Novellus Systems, Inc.
    Inventors: Stephen E. Hilliker, Anthony E. Sebastian, Yan Rubin, George Thomas