Patents by Inventor Yan-Ting Shen

Yan-Ting Shen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230352559
    Abstract: A dummy gate structure may be formed for a semiconductor device. The dummy gate structure may be formed from an amorphous polysilicon layer. The amorphous polysilicon layer may be deposited in a blanket deposition operation. An annealing operation is performed for the semiconductor device to remove voids, seams, and/or other defects from the amorphous polysilicon layer. The annealing operation may cause the amorphous polysilicon layer to crystallize, thereby resulting in the amorphous polysilicon layer transitioning into a crystallized polysilicon layer. A dual radio frequency (RF) source etch technique may be performed to increase the directionality of ions and radicals in a plasma that is used to etch the crystallized polysilicon layer to form the dummy gate structure. The increased directionality of the ions increases the effectiveness of the ions in etching through the different crystal grain boundaries which increases the etch rate uniformity across the crystallized polysilicon layer.
    Type: Application
    Filed: April 28, 2022
    Publication date: November 2, 2023
    Inventors: Yan-Ting SHEN, Yu-Li LIN, Jui Fu HSIEH, Chih-Teng LIAO
  • Publication number: 20230197487
    Abstract: A wafer supporting mechanism and a method for wafer dicing are provided. The wafer supporting mechanism includes a base portion and a support portion. The base portion includes a first gas channel and a first outlet connected to the first gas channel. The support portion is connected to the base portion and including a second gas channel connected to the first gas channel. An accommodation space is defined by the base portion and the support portion.
    Type: Application
    Filed: February 21, 2023
    Publication date: June 22, 2023
    Applicant: Advanced Semiconductor Engineering, Inc.
    Inventors: Bo Hua CHEN, Yan Ting SHEN, Fu Tang CHU, Wen-Pin HUANG
  • Patent number: 11587809
    Abstract: A wafer supporting mechanism and a method for wafer dicing are provided. The wafer supporting mechanism includes a base portion and a support portion. The base portion includes a first gas channel and a first outlet connected to the first gas channel. The support portion is connected to the base portion and including a second gas channel connected to the first gas channel. An accommodation space is defined by the base portion and the support portion.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: February 21, 2023
    Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
    Inventors: Bo Hua Chen, Yan Ting Shen, Fu Tang Chu, Wen-Pin Huang
  • Publication number: 20230037117
    Abstract: A method of manufacturing a semiconductor structure is provided. The method includes the following operations: providing a semiconductor substrate; performing a first cutting operation along a first set of cutting lines of the semiconductor substrate; and performing a second cutting operation along a second set of cutting lines of the semiconductor substrate later than performing the first cutting operation, wherein the second set of cutting lines are arranged interlacedly with the first set of cutting lines along a first direction.
    Type: Application
    Filed: July 30, 2021
    Publication date: February 2, 2023
    Applicant: Advanced Semiconductor Engineering, Inc.
    Inventors: Bo Hua CHEN, Yan Ting SHEN, Tsung Chi WU, Tai-Hung KUO
  • Publication number: 20220359746
    Abstract: A semiconductor device includes a fin structure protruding from an isolation insulating layer disposed over a substrate and having a channel region, a source/drain region disposed over the substrate, a gate dielectric layer disposed on the channel region, and a gate electrode layer disposed on the gate dielectric layer. The gate electrode includes a lower portion below a level of a top of the channel region and above an upper surface of the isolation insulating layer, and a width of the lower portion is not constant.
    Type: Application
    Filed: July 26, 2022
    Publication date: November 10, 2022
    Inventors: Yan-Ting SHEN, Chia-Chi YU, Chih-Teng LIAO, Yu-Li LIN, Chih Hsuan CHENG, Tzu-Chan WENG
  • Patent number: 11430893
    Abstract: A semiconductor device includes a fin structure protruding from an isolation insulating layer disposed over a substrate and having a channel region, a source/drain region disposed over the substrate, a gate dielectric layer disposed on the channel region, and a gate electrode layer disposed on the gate dielectric layer. The gate electrode includes a lower portion below a level of a top of the channel region and above an upper surface of the isolation insulating layer, and a width of the lower portion is not constant.
    Type: Grant
    Filed: July 10, 2020
    Date of Patent: August 30, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yan-Ting Shen, Chia-Chi Yu, Chih-Teng Liao, Yu-Li Lin, Chih Hsuan Cheng, Tzu-Chan Weng
  • Publication number: 20220102176
    Abstract: A wafer supporting mechanism and a method for wafer dicing are provided. The wafer supporting mechanism includes a base portion and a support portion. The base portion includes a first gas channel and a first outlet connected to the first gas channel. The support portion is connected to the base portion and including a second gas channel connected to the first gas channel. An accommodation space is defined by the base portion and the support portion.
    Type: Application
    Filed: September 30, 2020
    Publication date: March 31, 2022
    Applicant: Advanced Semiconductor Engineering, Inc.
    Inventors: Bo Hua CHEN, Yan Ting SHEN, Fu Tang CHU, Wen-Pin HUANG
  • Publication number: 20220013662
    Abstract: A semiconductor device includes a fin structure protruding from an isolation insulating layer disposed over a substrate and having a channel region, a source/drain region disposed over the substrate, a gate dielectric layer disposed on the channel region, and a gate electrode layer disposed on the gate dielectric layer. The gate electrode includes a lower portion below a level of a top of the channel region and above an upper surface of the isolation insulating layer, and a width of the lower portion is not constant.
    Type: Application
    Filed: July 10, 2020
    Publication date: January 13, 2022
    Inventors: Yan-Ting SHEN, Chia-Chi YU, Chih-Teng LIAO, Yu-Li LIN, Chih Hsuan CHENG, Tzu-Chan WENG
  • Patent number: 11189518
    Abstract: A method of processing a semiconductor wafer is provided. The method includes providing a semiconductor wafer having a front side and a back side, the semiconductor wafer provided with a circuit layer at the front side and a patterned surface at the back side, forming a sacrificial layer on the back side, mounting a tape on the sacrificial layer, the sacrificial layer isolating the patterned surface from the tape, wherein adhesion strength between the sacrificial layer and the patterned surface is larger than that between the sacrificial layer and the tape, dicing the semiconductor wafer at the back side through the tape, defining individual chips on the semiconductor wafer, and expanding the tape to separate the chips from each other.
    Type: Grant
    Filed: November 15, 2019
    Date of Patent: November 30, 2021
    Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
    Inventors: Yan Ting Shen, Bo Hua Chen, Fu Tang Chu, Wen Han Yang
  • Publication number: 20210151342
    Abstract: A method of processing a semiconductor wafer is provided. The method includes providing a semiconductor wafer having a front side and a back side, the semiconductor wafer provided with a circuit layer at the front side and a patterned surface at the back side, forming a sacrificial layer on the back side, mounting a tape on the sacrificial layer, the sacrificial layer isolating the patterned surface from the tape, wherein adhesion strength between the sacrificial layer and the patterned surface is larger than that between the sacrificial layer and the tape, dicing the semiconductor wafer at the back side through the tape, defining individual chips on the semiconductor wafer, and expanding the tape to separate the chips from each other.
    Type: Application
    Filed: November 15, 2019
    Publication date: May 20, 2021
    Applicant: Advanced Semiconductor Engineering, Inc.
    Inventors: Yan Ting SHEN, Bo Hua CHEN, Fu Tang CHU, Wen Han YANG
  • Patent number: 8080589
    Abstract: A method for producing a bio-based polymeric shoe component includes: preparing a blend from a composition including 5˜50 weight parts of a modified starch, 50˜95 weight parts of an ethylene vinyl acetate copolymer, 5˜30 weight parts of a filler, 1˜50 weight parts of a polyolefin, 2.0˜8.0 weight parts of a foaming agent, 0.5˜3.0 weight parts of a foaming aid, 0.5˜2.0 weight parts of a lubricant, and 0.4˜1.2 weight parts of a crosslinking agent, the modified starch being obtained by hydrolyzing and esterifying a predetermined amount of a raw starch to form a hydrolyzed and esterified starch, followed by drying the hydrolyzed and esterified starch; processing the blend into a foamable product; and forming the foamable product into the shoe component.
    Type: Grant
    Filed: June 2, 2010
    Date of Patent: December 20, 2011
    Assignees: Pou Chien Technology Co., Ltd., Feng Chia University
    Inventors: Shu-Yii Wu, Shih-Chien Chu, Ting-Yu Lee, Ming-Lei Wang, Yan-Ting Shen, Ying-Ming Lu, Yu-Hsin Chu
  • Publication number: 20100237527
    Abstract: A method for producing a bio-based polymeric shoe component includes: preparing a blend from a composition including 5˜50 weight parts of a modified starch, 50˜95 weight parts of an ethylene vinyl acetate copolymer, 5˜30 weight parts of a filler, 1˜50 weight parts of a polyolefin, 2.0˜8.0 weight parts of a foaming agent, 0.5˜3.0 weight parts of a foaming aid, 0.5˜2.0 weight parts of a lubricant, and 0.4˜1.2 weight parts of a crosslinking agent, the modified starch being obtained by hydrolyzing and esterifying a predetermined amount of a raw starch to form a hydrolyzed and esterified starch, followed by drying the hydrolyzed and esterified starch; processing the blend into a foamable product; and forming the foamable product into the shoe component.
    Type: Application
    Filed: June 2, 2010
    Publication date: September 23, 2010
    Applicants: Feng Chia University, Pou Chien Technology Co., Ltd.
    Inventors: Shu-Yii WU, Shih-Chien Chu, Ting-Yu Lee, Ming-Lei Wang, Yan-Ting Shen, Ying-Ming Lu, Yu-Hsin Chu