Patents by Inventor Yan Xiaolang

Yan Xiaolang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Broadband polarization spectrometer with inclined incidence and optical measurement system
    Patent number: 8767209
    Abstract: An oblique incidence broadband spectroscopic polarimeter which is easy to adjust the focus, achromatic, maintains the polarization and has simple structure is provided. It comprise at least one polarizer (P, A), at least one curved reflector element (OAP1, OAP2, OAP3, OAP4) and at least two flat reflector elements (M1, M2). By utilizing the flat reflector element, the oblique incidence broadband spectroscopic polarimeter can change the propagate direction of beam, and compensate the polarization changes caused by the reflective focusing unit, make the polarization of beam passed the polarizer unchanged when obliquely incident and focus on the sample surface. The oblique incidence broadband spectroscopic polarimeter can accurately measure the optical constants of sample material, film thickness, and/or the critical dimension (CD) properties or three-dimensional profile for analyze the periodic structure of the sample.
    Type: Grant
    Filed: May 30, 2011
    Date of Patent: July 1, 2014
    Assignee: Beioptics Technology Co., Ltd.
    Inventors: Guoguang Li, Tao Liu, Edgar Genio, Tiezhong Ma, Yan Xiaolang
  • BROADBAND POLARIZATION SPECTROMETER WITH INCLINED INCIDENCE AND OPTICAL MEASUREMENT SYTEM
    Publication number: 20130070234
    Abstract: An oblique incidence broadband spectroscopic polarimeter which is easy to adjust the focus, achromatic, maintains the polarization and has simple structure is provided. It comprise at least one polarizer (P, A), at least one curved reflector element (OAP1, OAP2, OAP3, OAP4) and at least two flat reflector elements (M1, M2). By utilizing the flat reflector element, the oblique incidence broadband spectroscopic polarimeter can change the propagate direction of beam, and compensate the polarization changes caused by the reflective focusing unit, make the polarization of beam passed the polarizer unchanged when obliquely incident and focus on the sample surface. The oblique incidence broadband spectroscopic polarimeter can accurately measure the optical constants of sample material, film thickness, and/or the critical dimension (CD) properties or three-dimensional profile for analyze the periodic structure of the sample.
    Type: Application
    Filed: May 30, 2011
    Publication date: March 21, 2013
    Applicant: BEIOPTICS TECHNOLOGY CO., LTD.
    Inventors: Guoguang Li, Tao Liu, Edgar Genio, Tiezhong Ma, Yan Xiaolang