Patents by Inventor Yanbian FANG

Yanbian FANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230130762
    Abstract: A plasma generating apparatus includes a feed-through and a cylindrical electrode. The feed-through device is configured to feed a medium frequency (MF) power. The cylindrical electrode includes a plurality of through holes in a wall of the cylindrical electrode and is connected to the feed-through device and configured to receive the MF power from the feed-through device and ionize a gas to generate plasma. The cylindrical electrode includes a main body; and an end cover fixed to one end of the main body. The feed-through device includes a feed-through conductor electrically connected to the cylindrical electrode and configured to feed the MF power to the cylindrical electrode, and a feed-through insulating layer covering at least a part of the feed-through conductor.
    Type: Application
    Filed: March 24, 2021
    Publication date: April 27, 2023
    Applicant: FERMION INSTRUMENTS (SHANGHAI) CO., LTD.
    Inventors: Binping XIE, Yanbian FANG, Liang WANG, Jiayue GUAN, Yanhui WANG