Patents by Inventor Yanbing HU

Yanbing HU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for setting coating module quantity and robot speed
    Patent number: 9443745
    Abstract: The present invention relates to developing and design a coater & developer with high throughput that in-line with lithograph equipment during integrated circuit production, which needs to reasonably set the quantity of processing modules and the transfer speed of robots in the coater & developer. The present invention provides a method for setting the quantity of the processing modules and the transfer speed of the robots in the coater & developer, including steps of determining the processing time parameter of the coater & developer according to the target throughput, and designing the processing periodic time parameter of each processing module and the transfer periodic time parameter of each wafer transfer robot in the coater & developer make the three time parameters tend to consistency.
    Type: Grant
    Filed: April 16, 2014
    Date of Patent: September 13, 2016
    Assignee: KINGSEMI CO., LTD.
    Inventors: Yanbing Hu, Wei Feng
  • METHOD FOR SETTING COATING MODULE QUANTITY AND ROBOT SPEED
    Publication number: 20150303076
    Abstract: The present invention relates to developing and design a coater & developer with high throughput that in-line with lithograph equipment during integrated circuit production, which needs to reasonably set the quantity of processing modules and the transfer speed of robots in the coater & developer. The present invention provides a method for setting the quantity of the processing modules and the transfer speed of the robots in the coater & developer, including steps of determining the processing time parameter of the coater & developer according to the target throughput, and designing the processing periodic time parameter of each processing module and the transfer periodic time parameter of each wafer transfer robot in the coater & developer make the three time parameters tend to consistency.
    Type: Application
    Filed: April 16, 2014
    Publication date: October 22, 2015
    Inventors: Yanbing HU, Wei FENG