Patents by Inventor Yang II Jeon

Yang II Jeon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR CLEANING A SUBSTRATE
    Publication number: 20150129000
    Abstract: An apparatus for cleaning a substrate includes a substrate transferring unit configured to support a substrate at a polar angle from a first direction, and transfer the substrate along a second direction orthogonal to the first direction. A cleaning unit is disposed on the substrate transferring unit. The cleaning unit includes a plurality of two-fluid nozzles. The cleaning unit has an azimuth angle from the first direction. The two-fluid nozzles mix a cleaning solution and compressed gas together and spray the mixture.
    Type: Application
    Filed: August 20, 2014
    Publication date: May 14, 2015
    Inventors: Seok Jun JANG, Bong Kyun Kim, Yang II Jeon