Abstract: Disclosed is an ultrasonic cleaning apparatus, which generates uniform sound pressure across a wide area of a piezoelectric element without the sound pressure being concentrated into the middle of the piezoelectric element to thereby increase cleaning efficiency without damage of an object to be cleaned.

Abstract: Disclosed herein is a cleaning apparatus using ultrasonic waves. The cleaning apparatus to separate contaminations from a wafer includes a housing receiving an oscillator therein, and a rod coupled to a surface of the oscillator to transmit ultrasonic waves produced from the oscillator to a cleaning solution applied onto an upper surface of the wafer. The oscillator includes a piezoelectric device bonded to a diffusive layer consisting of a near-field region and a far-field region. The rod has a diameter-reduced portion to amplify the ultrasonic waves produced from the oscillator, thereby enabling the efficient removal of the contaminations on the wafer to be cleaned.

Abstract: Disclosed herein is a megasonic cleaning module. The megasonic cleaning module includes a vibrator having a piezoelectric element mounted therein for generating ultrasonic waves by the vibration of the piezoelectric element, a first vibratory rod having a diameter gradually decreased to concentrate the longitudinal ultrasonic waves generated from the vibrator, and a second vibratory rod for progressing the longitudinal ultrasonic waves, generated from the first vibratory rod, in the transverse direction. The size of the second vibratory rod at one side thereof where the second vibratory rod is coupled to the first vibratory rod is less than that of the second vibratory rod at the other side thereof, with the result that the longitudinal ultrasonic waves are not prevented from affecting the wafer.

Abstract: Disclosed herein is a megasonic cleaning module. The megasonic cleaning module includes a vibrator having a piezoelectric element mounted therein for generating ultrasonic waves by the vibration of the piezoelectric element, a first vibratory rod having a diameter gradually decreased to concentrate the longitudinal ultrasonic waves generated from the vibrator, and a second vibratory rod for progressing the longitudinal ultrasonic waves, generated from the first vibratory rod, in the transverse direction. The size of the second vibratory rod at one side thereof where the second vibratory rod is coupled to the first vibratory rod is less than that of the second vibratory rod at the other side thereof, with the result that the longitudinal ultrasonic waves are not prevented from affecting the wafer.

Abstract: Disclosed herein is a cleaning apparatus using ultrasonic waves. The cleaning apparatus to separate contaminations from a wafer includes a housing receiving an oscillator therein, and a rod coupled to a surface of the oscillator to transmit ultrasonic waves produced from the oscillator to a cleaning solution applied onto an upper surface of the wafer. The oscillator includes a piezo-electric device bonded to a diffusive layer consisting of a near-field region and a far-field region. The rod has a diameter-reduced portion to amplify the ultrasonic waves produced from the oscillator, thereby enabling the efficient removal of the contaminations on the wafer to be cleaned.

Abstract: A wing type ultrasonic transducer is free from a reduction in the output power and has one ultrasonic generator. This ultrasonic generator has piezoelectric ceramic materials with two countermasses respectively coupled to the outside ends of the piezoelectric ceramic materials. A rod-like resonator is coaxially coupled to the outside end of each of the countermasses and is used to emit ultrasonic waves to a liquid in a radial direction. An immersible housing covers the ultrasonic generator so as to accomplish a water tightness of the ultrasonic generator. The rod-like resonator may be a solid resonator or hollow resonator. In addition, the rod-like resonator is integral times as long as a half-wavelength (&lgr;/2) at an operating resonant frequency.

Abstract: A power ultrasonic transducer according to the present invention includes: an ultrasonic generator comprised of two pairs of piezoceramic elements which are adjoined to be coupled to each other on the same shaft and a countermass attached at the both ends of the piezoceramic elements; a hollow type body having a length of integer times of half wavelength, in which the ultrasonic generator is positioned; a cylindrical transmitting rod having a length of integer times of half wavelength and for connecting the one side of the body with the one side of the ultrasonic generator to be fixed on the both sides of the ultrasonic generator, respectively; and a threaded stud for securing an electric wire for power supply at the one side end of the outside of the body, the electric wire for power supply passing through the countermass and the interior of the transmitting rod each positioned in the interior of the body to be wired to the piezoceramic elements.

Abstract: A method of manufacturing an ultrasonic generator adapted to ultrasonic sterilizers, for minimizing the heat input of a magnetostrictive element, comprises the steps of: forming, on a wave guide, melting layers constructed of joining materials such as Al--Si alloy and Sn--Ag alloy which melt within a temperature range of 575.about.590.degree. C. and 230.about.250.degree. C., respectively, and have tensile strength of 17.about.25 kg/mm.sup.2 and 10.about.15 kg/mm.sup.2, respectively; and joining the wave guide with the magnetostrictive element.

Abstract: Provided is a circuit for driving a magnetostrictive device including: a high voltage interrupting circuit section for interrupting an instantaneously leaking high voltage depending on the switching operation of a power switch; a voltage storage section for rectifying an input voltage for a half of the positive cycle and storing it; a switching circuit section for supplying the voltage stored in the voltage storage section to the magnetostrictive device; and a voltage discharging circuit section for discharge the voltage remaining in the voltage storage section when the power is interrupted.