Patents by Inventor Yang-Woo Jin

Yang-Woo Jin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing pad conditioner and chemical-mechanical polishing apparatus having the same
    Patent number: 6893336
    Abstract: A polishing pad conditioner for a chemical-mechanical polishing apparatus includes a conditioning plate having a first recess and a holder having a second recess. The first recess is formed on the upper face of the conditioning plate, and the second recess is formed on the bottom face of the holder. A first filling member having a specific gravity smaller than that of the conditioning plate fills up the first recess, and a second filling member having a specific gravity smaller than that of the holder fills up the second recess. Therefore, the weight of the polishing pad conditioner can be reduced, and the durability and service life of an air bladder that adjusts the height of the polishing pad conditioner can be improved.
    Type: Grant
    Filed: May 30, 2003
    Date of Patent: May 17, 2005
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Yang-Woo Jin
  • Polishing pad conditioner and chemical-mechanical polishing apparatus having the same
    Publication number: 20040018807
    Abstract: A polishing pad conditioner for a chemical-mechanical polishing apparatus includes a conditioning plate having a first recess and a holder having a second recess. The first recess is formed on the upper face of the conditioning plate, and the second recess is formed on the bottom face of the holder. A first filling member having a specific gravity smaller than that of the conditioning plate fills up the first recess, and a second filling member having a specific gravity smaller than that of the holder fills up the second recess. Therefore, the weight of the polishing pad conditioner can be reduced, and the durability and service life of an air bladder that adjusts the height of the polishing pad conditioner can be improved.
    Type: Application
    Filed: May 30, 2003
    Publication date: January 29, 2004
    Inventor: Yang-Woo Jin