Patents by Inventor YANGYEOL RYU

YANGYEOL RYU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Liquid dispensing nozzle and substrate treating apparatus
    Patent number: 11148150
    Abstract: The inventive concept relates to a liquid dispensing nozzle and an apparatus for treating a substrate. The liquid dispensing nozzle includes a first fluid channel that is formed in the nozzle and through which a processing liquid flows and a second fluid channel in communication with the first fluid channel, the second fluid channel being connected to a dispensing end of the nozzle. The second fluid channel has a larger width than the first fluid channel, and a central axis of the first fluid channel and a central axis of the second fluid channel are connected with each other in a straight line.
    Type: Grant
    Filed: October 21, 2019
    Date of Patent: October 19, 2021
    Assignee: SEMES CO., LTD.
    Inventors: Byoungdoo Choi, Yangyeol Ryu, Dong Sub Oh, Hye Bin Baek
  • LIQUID DISPENSING NOZZLE AND SUBSTRATE TREATING APPARATUS
    Publication number: 20200122165
    Abstract: The inventive concept relates to a liquid dispensing nozzle and an apparatus for treating a substrate. The liquid dispensing nozzle includes a first fluid channel that is formed in the nozzle and through which a processing liquid flows and a second fluid channel in communication with the first fluid channel, the second fluid channel being connected to a dispensing end of the nozzle. The second fluid channel has a larger width than the first fluid channel, and a central axis of the first fluid channel and a central axis of the second fluid channel are connected with each other in a straight line.
    Type: Application
    Filed: October 21, 2019
    Publication date: April 23, 2020
    Inventors: BYOUNGDOO CHOI, YANGYEOL RYU, DONG SUB OH, HYE BIN BAEK