Abstract: A workstation includes: a processing chamber configured to process a workpiece; a load port configured to interface with an environment external to the workstation; a robotic arm configured to transfer the workpiece between the load port and the processing chamber; and a defect sensor configured to detect a defect along a surface of the workpiece when transferred between the load port and the processing chamber.

Abstract: In an embodiment, a workstation includes: a processing chamber configured to process a workpiece; a load port configured to interface with an environment external to the workstation; a robotic arm configured to transfer the workpiece between the load port and the processing chamber; and a defect sensor configured to detect a defect along a surface of the workpiece when transferred between the load port and the processing chamber.

Abstract: As disclosed herein, the present invention is directed to unique gene cassettes, and methods for their use, wherein the gene cassettes comprise multifunctional transgenic DNA sequences that completely, or nearly completely, excise themselves from the genome of plants into which they are introduced. The excision process is triggered in response to specific internal or external stimuli by means of excision/recombinase systems in unique combinations and orientations within the multifunctional transgenic sequences. Complete, or nearly complete, removal of the heterologous DNA significantly reduces the possibility of uncontrolled propagation of the transgenic species and may, more importantly, permit crops produced from transgenic plants to be co-mingled with non-transgenic crops for marketing purposes.