Patents by Inventor Yaniv Brami

Yaniv Brami has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Specimen current mapper
    Patent number: 7473911
    Abstract: A method for process monitoring includes receiving a sample having a first layer that is at least partly conductive and a second layer formed over the first layer, following production of contact openings in the second layer. A beam of charged particles is directed along a beam axis that deviates substantially in angle from a normal to a surface of the sample, so as to irradiate one or more of the contact openings in each of a plurality of locations distributed over at least a region of the sample. A specimen current flowing through the first layer is measured in response to irradiation of the one or more of the contact openings at each of the plurality of locations. A map of at least the region of the sample is created, indicating the specimen current measured in response to the irradiation at the plurality of the locations.
    Type: Grant
    Filed: October 27, 2003
    Date of Patent: January 6, 2009
    Assignee: Applied Materials, Israel, Ltd.
    Inventors: Alexander Kadyshevitch, Dror Shemesh, Yaniv Brami, Dmitry Shur
  • Specimen current mapper
    Publication number: 20040084622
    Abstract: A method for process monitoring includes receiving a sample having a first layer that is at least partly conductive and a second layer formed over the first layer, following production of contact openings in the second layer. A beam of charged particles is directed along a beam axis that deviates substantially in angle from a normal to a surface of the sample, so as to irradiate one or more of the contact openings in each of a plurality of locations distributed over at least a region of the sample. A specimen current flowing through the first layer is measured in response to irradiation of the one or more of the contact openings at each of the plurality of locations. A map of at least the region of the sample is created, indicating the specimen current measured in response to the irradiation at the plurality of the locations.
    Type: Application
    Filed: October 27, 2003
    Publication date: May 6, 2004
    Applicant: Applied Materials Israel Ltd
    Inventors: Alexander Kadyshevitch, Dror Shemesh, Yaniv Brami, Dmitry Shur