Patents by Inventor Yann HENRION

Yann HENRION has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11610933
    Abstract: Image sensors and methods of manufacturing image sensors are provided herein. In an embodiment, a method of manufacturing an image sensor includes forming a structure having a front side and a back side. The structure includes a semiconductor layer extending between the front side and the back side of the structure, and a capacitive insulation wall extending through the semiconductor layer between the front side and the back side of the structure. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductive or semiconductor material. The method further includes selectively etching, from the back side of the structure, portions of the semiconductor layer and the region of conductive or semiconductor material, while retaining adjacent portions of the first and second insulating walls.
    Type: Grant
    Filed: May 21, 2021
    Date of Patent: March 21, 2023
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventors: Frederic Lalanne, Laurent Gay, Pascal Fonteneau, Yann Henrion, Francois Guyader
  • Publication number: 20220336520
    Abstract: Image sensors and methods of manufacturing image sensors are provided. One such method includes forming a structure that includes a semiconductor layer extending from a front side to a back side, and a capacitive insulation wall extending through the semiconductor layer. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductor or a semiconductor material. Portions of the semiconductor layer and the region of the conductor or semiconductor material are selectively etched, and the first and second insulating walls have portions protruding outwardly beyond a back side of the semiconductor layer and of the region of the conductor or semiconductor material. A dielectric passivation layer is deposited on the back side of the structure, and portions of the dielectric passivation layer are locally removed on a back side of the protruding portions of the first and second insulating walls.
    Type: Application
    Filed: June 30, 2022
    Publication date: October 20, 2022
    Applicant: STMicroelectronics (Crolles 2) SAS
    Inventors: Laurent GAY, Frederic LALANNE, Yann HENRION, Francois GUYADER, Pascal FONTENEAU, Aurelien SEIGNARD
  • Patent number: 11398521
    Abstract: Image sensors and methods of manufacturing image sensors are provided. One such method includes forming a structure that includes a semiconductor layer extending from a front side to a back side, and a capacitive insulation wall extending through the semiconductor layer. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductor or a semiconductor material. Portions of the semiconductor layer and the region of the conductor or semiconductor material are selectively etched, and the first and second insulating walls have portions protruding outwardly beyond a back side of the semiconductor layer and of the region of the conductor or semiconductor material. A dielectric passivation layer is deposited on the back side of the structure, and portions of the dielectric passivation layer are locally removed on a back side of the protruding portions of the first and second insulating walls.
    Type: Grant
    Filed: January 10, 2020
    Date of Patent: July 26, 2022
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventors: Laurent Gay, Frederic Lalanne, Yann Henrion, Francois Guyader, Pascal Fonteneau, Aurelien Seignard
  • Publication number: 20210288102
    Abstract: Image sensors and methods of manufacturing image sensors are provided herein. In an embodiment, a method of manufacturing an image sensor includes forming a structure having a front side and a back side. The structure includes a semiconductor layer extending between the front side and the back side of the structure, and a capacitive insulation wall extending through the semiconductor layer between the front side and the back side of the structure. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductive or semiconductor material. The method further includes selectively etching, from the back side of the structure, portions of the semiconductor layer and the region of conductive or semiconductor material, while retaining adjacent portions of the first and second insulating walls.
    Type: Application
    Filed: May 21, 2021
    Publication date: September 16, 2021
    Applicant: STMicroelectronics (Crolles 2) SAS
    Inventors: Frederic LALANNE, Laurent GAY, Pascal FONTENEAU, Yann HENRION, Francois GUYADER
  • Patent number: 11031433
    Abstract: Image sensors and methods of manufacturing image sensors are provided herein. In an embodiment, a method of manufacturing an image sensor includes forming a structure having a front side and a back side. The structure includes a semiconductor layer extending between the front side and the back side of the structure, and a capacitive insulation wall extending through the semiconductor layer between the front side and the back side of the structure. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductive or semiconductor material. The method further includes selectively etching, from the back side of the structure, portions of the semiconductor layer and the region of conductive or semiconductor material, while retaining adjacent portions of the first and second insulating walls.
    Type: Grant
    Filed: February 8, 2019
    Date of Patent: June 8, 2021
    Assignee: STMicroelectronics (Crolles) SAS
    Inventors: Frederic Lalanne, Laurent Gay, Pascal Fonteneau, Yann Henrion, Francois Guyader
  • Publication number: 20200227451
    Abstract: Image sensors and methods of manufacturing image sensors are provided. One such method includes forming a structure that includes a semiconductor layer extending from a front side to a back side, and a capacitive insulation wall extending through the semiconductor layer. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductor or a semiconductor material. Portions of the semiconductor layer and the region of the conductor or semiconductor material are selectively etched, and the first and second insulating walls have portions protruding outwardly beyond a back side of the semiconductor layer and of the region of the conductor or semiconductor material. A dielectric passivation layer is deposited on the back side of the structure, and portions of the dielectric passivation layer are locally removed on a back side of the protruding portions of the first and second insulating walls.
    Type: Application
    Filed: January 10, 2020
    Publication date: July 16, 2020
    Inventors: Laurent GAY, Frederic LALANNE, Yann HENRION, Francois GUYADER, Pascal FONTENEAU, Aurelien SEIGNARD
  • Publication number: 20190252457
    Abstract: Image sensors and methods of manufacturing image sensors are provided herein. In an embodiment, a method of manufacturing an image sensor includes forming a structure having a front side and a back side. The structure includes a semiconductor layer extending between the front side and the back side of the structure, and a capacitive insulation wall extending through the semiconductor layer between the front side and the back side of the structure. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductive or semiconductor material. The method further includes selectively etching, from the back side of the structure, portions of the semiconductor layer and the region of conductive or semiconductor material, while retaining adjacent portions of the first and second insulating walls.
    Type: Application
    Filed: February 8, 2019
    Publication date: August 15, 2019
    Inventors: Frederic LALANNE, Laurent GAY, Pascal FONTENEAU, Yann HENRION, Francois GUYADER
  • Publication number: 20110024744
    Abstract: The invention relates to electronic components on thinned substrates, for example image sensors. Preferably, connection pads are connected through the thinned substrate to underlying layers and notably to a test pad by way of openings through which the metal of the pad passes. The openings are elongate openings extending along one edge of the pad of rectangular shape and a circular area of at least 50% (and preferably 65 to 75%) of the area of the pad contains no opening for connection with the underlying layers. This circular area is intended for bonding an external connection wire. The connection pads are testable from the back side by test probes and the front side may be tested (before bonding and thinning) by test probes with the same geometric configuration.
    Type: Application
    Filed: July 28, 2010
    Publication date: February 3, 2011
    Applicant: E2V SEMICONDUCTORS
    Inventors: Pierre FEREYRE, Vincent HIBON, Yann HENRION, Patrick LARIVIERE