Patents by Inventor Yann HENRION
Yann HENRION has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12199131Abstract: Image sensors and methods of manufacturing image sensors are provided. One such method includes forming a structure that includes a semiconductor layer extending from a front side to a back side, and a capacitive insulation wall extending through the semiconductor layer. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductor or a semiconductor material. Portions of the semiconductor layer and the region of the conductor or semiconductor material are selectively etched, and the first and second insulating walls have portions protruding outwardly beyond a back side of the semiconductor layer and of the region of the conductor or semiconductor material. A dielectric passivation layer is deposited on the back side of the structure, and portions of the dielectric passivation layer are locally removed on a back side of the protruding portions of the first and second insulating walls.Type: GrantFiled: June 30, 2022Date of Patent: January 14, 2025Assignee: STMicroelectronics (Crolles 2) SASInventors: Laurent Gay, Frederic Lalanne, Yann Henrion, Francois Guyader, Pascal Fonteneau, Aurelien Seignard
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Patent number: 11610933Abstract: Image sensors and methods of manufacturing image sensors are provided herein. In an embodiment, a method of manufacturing an image sensor includes forming a structure having a front side and a back side. The structure includes a semiconductor layer extending between the front side and the back side of the structure, and a capacitive insulation wall extending through the semiconductor layer between the front side and the back side of the structure. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductive or semiconductor material. The method further includes selectively etching, from the back side of the structure, portions of the semiconductor layer and the region of conductive or semiconductor material, while retaining adjacent portions of the first and second insulating walls.Type: GrantFiled: May 21, 2021Date of Patent: March 21, 2023Assignee: STMicroelectronics (Crolles 2) SASInventors: Frederic Lalanne, Laurent Gay, Pascal Fonteneau, Yann Henrion, Francois Guyader
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Publication number: 20220336520Abstract: Image sensors and methods of manufacturing image sensors are provided. One such method includes forming a structure that includes a semiconductor layer extending from a front side to a back side, and a capacitive insulation wall extending through the semiconductor layer. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductor or a semiconductor material. Portions of the semiconductor layer and the region of the conductor or semiconductor material are selectively etched, and the first and second insulating walls have portions protruding outwardly beyond a back side of the semiconductor layer and of the region of the conductor or semiconductor material. A dielectric passivation layer is deposited on the back side of the structure, and portions of the dielectric passivation layer are locally removed on a back side of the protruding portions of the first and second insulating walls.Type: ApplicationFiled: June 30, 2022Publication date: October 20, 2022Applicant: STMicroelectronics (Crolles 2) SASInventors: Laurent GAY, Frederic LALANNE, Yann HENRION, Francois GUYADER, Pascal FONTENEAU, Aurelien SEIGNARD
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Patent number: 11398521Abstract: Image sensors and methods of manufacturing image sensors are provided. One such method includes forming a structure that includes a semiconductor layer extending from a front side to a back side, and a capacitive insulation wall extending through the semiconductor layer. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductor or a semiconductor material. Portions of the semiconductor layer and the region of the conductor or semiconductor material are selectively etched, and the first and second insulating walls have portions protruding outwardly beyond a back side of the semiconductor layer and of the region of the conductor or semiconductor material. A dielectric passivation layer is deposited on the back side of the structure, and portions of the dielectric passivation layer are locally removed on a back side of the protruding portions of the first and second insulating walls.Type: GrantFiled: January 10, 2020Date of Patent: July 26, 2022Assignee: STMicroelectronics (Crolles 2) SASInventors: Laurent Gay, Frederic Lalanne, Yann Henrion, Francois Guyader, Pascal Fonteneau, Aurelien Seignard
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Publication number: 20210288102Abstract: Image sensors and methods of manufacturing image sensors are provided herein. In an embodiment, a method of manufacturing an image sensor includes forming a structure having a front side and a back side. The structure includes a semiconductor layer extending between the front side and the back side of the structure, and a capacitive insulation wall extending through the semiconductor layer between the front side and the back side of the structure. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductive or semiconductor material. The method further includes selectively etching, from the back side of the structure, portions of the semiconductor layer and the region of conductive or semiconductor material, while retaining adjacent portions of the first and second insulating walls.Type: ApplicationFiled: May 21, 2021Publication date: September 16, 2021Applicant: STMicroelectronics (Crolles 2) SASInventors: Frederic LALANNE, Laurent GAY, Pascal FONTENEAU, Yann HENRION, Francois GUYADER
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Patent number: 11031433Abstract: Image sensors and methods of manufacturing image sensors are provided herein. In an embodiment, a method of manufacturing an image sensor includes forming a structure having a front side and a back side. The structure includes a semiconductor layer extending between the front side and the back side of the structure, and a capacitive insulation wall extending through the semiconductor layer between the front side and the back side of the structure. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductive or semiconductor material. The method further includes selectively etching, from the back side of the structure, portions of the semiconductor layer and the region of conductive or semiconductor material, while retaining adjacent portions of the first and second insulating walls.Type: GrantFiled: February 8, 2019Date of Patent: June 8, 2021Assignee: STMicroelectronics (Crolles) SASInventors: Frederic Lalanne, Laurent Gay, Pascal Fonteneau, Yann Henrion, Francois Guyader
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Publication number: 20200227451Abstract: Image sensors and methods of manufacturing image sensors are provided. One such method includes forming a structure that includes a semiconductor layer extending from a front side to a back side, and a capacitive insulation wall extending through the semiconductor layer. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductor or a semiconductor material. Portions of the semiconductor layer and the region of the conductor or semiconductor material are selectively etched, and the first and second insulating walls have portions protruding outwardly beyond a back side of the semiconductor layer and of the region of the conductor or semiconductor material. A dielectric passivation layer is deposited on the back side of the structure, and portions of the dielectric passivation layer are locally removed on a back side of the protruding portions of the first and second insulating walls.Type: ApplicationFiled: January 10, 2020Publication date: July 16, 2020Inventors: Laurent GAY, Frederic LALANNE, Yann HENRION, Francois GUYADER, Pascal FONTENEAU, Aurelien SEIGNARD
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Publication number: 20190252457Abstract: Image sensors and methods of manufacturing image sensors are provided herein. In an embodiment, a method of manufacturing an image sensor includes forming a structure having a front side and a back side. The structure includes a semiconductor layer extending between the front side and the back side of the structure, and a capacitive insulation wall extending through the semiconductor layer between the front side and the back side of the structure. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductive or semiconductor material. The method further includes selectively etching, from the back side of the structure, portions of the semiconductor layer and the region of conductive or semiconductor material, while retaining adjacent portions of the first and second insulating walls.Type: ApplicationFiled: February 8, 2019Publication date: August 15, 2019Inventors: Frederic LALANNE, Laurent GAY, Pascal FONTENEAU, Yann HENRION, Francois GUYADER
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Publication number: 20110024744Abstract: The invention relates to electronic components on thinned substrates, for example image sensors. Preferably, connection pads are connected through the thinned substrate to underlying layers and notably to a test pad by way of openings through which the metal of the pad passes. The openings are elongate openings extending along one edge of the pad of rectangular shape and a circular area of at least 50% (and preferably 65 to 75%) of the area of the pad contains no opening for connection with the underlying layers. This circular area is intended for bonding an external connection wire. The connection pads are testable from the back side by test probes and the front side may be tested (before bonding and thinning) by test probes with the same geometric configuration.Type: ApplicationFiled: July 28, 2010Publication date: February 3, 2011Applicant: E2V SEMICONDUCTORSInventors: Pierre FEREYRE, Vincent HIBON, Yann HENRION, Patrick LARIVIERE