Abstract: Fabricating a crystalline metal-phosphide layer may include providing a crystalline base substrate and a step of forming a crystalline metal-source layer. The method may further include performing a chemical conversion reaction to convert the metal-source layer to the crystalline metal phosphide layer. One or more corresponding semiconductor structures can be also provided.

Abstract: Embodiments of the invention are directed to a method of fabrication of an electro-optical device. A non-limiting example of the method relies on a waveguide. A trench is opened in the waveguide and a stack of optically active semiconductor materials is directly grown from a bottom wall of the trench and are stacked along a stacking direction that is perpendicular to a main plane of the waveguide. The stack is partly encapsulated in the waveguide, whereby a bottom layer of the stack is in direct contact with a waveguide core material, whereas upper portions of opposite, lateral sides of the stack are exposed. An insulating layer of material is deposited to cover exposed surfaces of the waveguide and structured to form a lateral growth template. Contact layers are laterally grown due to the lateral growth template formed. The contact layers can include an n-doped and p-doped contact layers.

Abstract: Embodiments of the invention are directed to a method of fabrication of an electro-optical device. A non-limiting example of the method relies on a waveguide. A trench is opened in the waveguide and a stack of optically active semiconductor materials is directly grown from a bottom wall of the trench and are stacked along a stacking direction that is perpendicular to a main plane of the waveguide. The stack is partly encapsulated in the waveguide, whereby a bottom layer of the stack is in direct contact with a waveguide core material, whereas upper portions of opposite, lateral sides of the stack are exposed. An insulating layer of material is deposited to cover exposed surfaces of the waveguide and structured to form a lateral growth template. Contact layers are laterally grown due to the lateral growth template formed. The contact layers can include an n-doped and p-doped contact layers.

Abstract: Fabricating a crystalline metal-phosphide layer may include providing a crystalline base substrate and a step of forming a crystalline metal-source layer. The method may further include performing a chemical conversion reaction to convert the metal-source layer to the crystalline metal phosphide layer. One or more corresponding semiconductor structures can be also provided.

Abstract: A method for fabricating a semiconductor substrate comprises providing a crystalline base substrate, forming an insulating layer on the crystalline base substrate and forming a trench in the insulating layer. This exposes a seed surface of the base substrate. The trench has sidewalls and a bottom. The bottom corresponds to the seed surface of the base substrate. The method further comprises growing, at a first growth step, an elongated seed structure in the trench from the seed surface of the substrate and forming a cavity structure above the insulating layer. The cavity structure covers the elongated seed structure and extends laterally to the elongated seed structure. The method comprises a further step of growing, at a second growth step, the semiconductor substrate in the cavity structure from the elongated seed structure. The invention is notably also directed to corresponding semiconductor structures and corresponding semiconductor substrates.

Abstract: A method for fabricating a semiconductor substrate comprises providing a crystalline base substrate, forming an insulating layer on the crystalline base substrate and forming a trench in the insulating layer. This exposes a seed surface of the base substrate. The trench has sidewalls and a bottom. The bottom corresponds to the seed surface of the base substrate. The method further comprises growing, at a first growth step, an elongated seed structure in the trench from the seed surface of the substrate and forming a cavity structure above the insulating layer. The cavity structure covers the elongated seed structure and extends laterally to the elongated seed structure. The method comprises a further step of growing, at a second growth step, the semiconductor substrate in the cavity structure from the elongated seed structure. The invention is notably also directed to corresponding semiconductor structures and corresponding semiconductor substrates.