Patents by Inventor Yannick KNOPS

Yannick KNOPS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Control system, method to increase a bandwidth of a control system, and lithographic apparatus
    Patent number: 11454938
    Abstract: The invention relates to a control system comprising a controller arranged to provide an output signal on the basis of an input signal. The controller comprises a linear integrator, a linear gain and a selector. The linear integrator is arranged to provide a first control signal. The linear gain is in parallel to the linear integrator and is arranged to provide a second control signal. The selector is arranged to switch between an integrator mode in which the first control signal is used as the output signal of the controller and a gain mode in which the second control signal is used as the output signal of the controller. The selector is arranged to switch to the integrator mode when the value of the second control signal passes zero, and to switch to the gain mode when: eu<kh?1u2, wherein e is the input signal of the controller, u is the output signal of the controller, and kh is the gain of the linear gain.
    Type: Grant
    Filed: April 23, 2018
    Date of Patent: September 27, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Marcel François Heertjes, Daniel Andreas Deenen, Natalia Irigoyen Perdiguero, Yannick Knops
  • Control System, Method to Increase a Bandwidth of a Control System, and Lithographic Apparatus
    Publication number: 20200174428
    Abstract: The invention relates to a control system comprising a controller arranged to provide an output signal on the basis of an input signal. The controller comprises a linear integrator, a linear gain and a selector. The linear integrator is arranged to provide a first control signal. The linear gain is in parallel to the linear integrator and is arranged to provide a second control signal. The selector is arranged to switch between an integrator mode in which the first control signal is used as the output signal of the controller and a gain mode in which the second control signal is used as the output signal of the controller. The selector is arranged to switch to the integrator mode when the value of the second control signal passes zero, and to switch to the gain mode when: eu<kh?1u2, wherein e is the input signal of the controller, u is the output signal of the controller, and kh is the gain of the linear gain.
    Type: Application
    Filed: April 23, 2018
    Publication date: June 4, 2020
    Applicant: ASML Netherlands B.V.
    Inventors: Marcel François HEERTJES, Daniel DEENEN, Natalia IRIGOYEN PERDIGUERO, Yannick KNOPS