Abstract: Embodiments of the present disclosure provide an MEMS switch and an electronic device. The MEMS switch includes: a base substrate; an electrode structure on the base substrate, including a first ground electrode, a signal transmission line, a second ground electrode, a first drive electrode and a third ground electrode which are sequentially arranged on the base substrate at intervals; and a metal beam stretching over the electrode structure, where a first end of the metal beam is electrically connected to the third ground electrode, an orthographic projection of a second end of the metal beam on the base substrate is within an orthographic projection of the signal transmission line on the base substrate, and an orthographic projection of the metal beam on the base substrate is overlapped with an orthographic projection of the first drive electrode on the base substrate.

Abstract: A modulation unit includes a base plate, including a substrate, and a metal layer provided on one side of the substrate, the metal layer is provided with a slit; and a driving layer, provided on one side of the base plate, including a polar plate and a driving structure, with a gap between the polar plate and the base plate; wherein the modulation unit includes at least one resonant structure including a slit, a polar plate, and a driving structure; in the same resonant structure, the driving structure is connected to the polar plate for driving the polar plate to move in response to a driving signal, to change a size of an overlap region of an orthographic projection of the polar plate on the base plate and the slit, to adjust a resonant frequency of the resonant structure.

Abstract: The disclosure provides a micro-electromechanical system switch and a communication device. The micro-electromechanical system switch includes: a substrate; a DC bias line, arranged on one side of the substrate; a first signal transmission line and a second signal transmission line, arranged on the same side of the substrate as the DC bias line; a cantilever beam, arranged on a side, away from the substrate, of a layer on which the first signal transmission line is located; and a fixing structure, arranged on the side, away from the substrate, of the layer on which the first signal transmission line is located and not in contact with the first signal transmission line, where the fixing structure connects the free end and the substrate.

Abstract: A MEMS switch includes: a substrate, an anchor point, the first signal line, a first driving electrode, a switch beam, and a second signal line. The anchor point is on the substrate. The first signal line and the first driving electrode are on the substrate, and are arranged on two sides of the anchor point. The second signal line is on a side of the anchor point close to the substrate. The switch beam is connected with the anchor point, and two ends of the switch beam are suspended and on the side of the anchor point away from the substrate, an orthographic projection of the switch beam onto the substrate surface coincides at least partially with the orthographic projection of the first signal line onto the substrate surface, and an orthographic projection of the first driving electrode onto the substrate surface, respectively.

Abstract: An antenna, a display substrate and a display device are provided in the present disclosure, wherein the antenna includes a first conductive layer (11), a dielectric layer (12) and a second conductive layer (13) which are stacked; the first conductive layer (11) is provided with at least one slot (111); the second conductive layer (13) includes at least one conductive structure (130), the conductive structure (130) is a comb structure, the conductive structure (130) includes a first conductive element (131) and a plurality of second conductive elements (132), the first conductive element (131) constitutes a comb back of the comb structure, and the plurality of second conductive elements (132) constitute comb teeth of the comb structure; at least one conductive structure (130) is disposed corresponding to at least one slot (111).

Abstract: A micro-electro-mechanical system and a manufacturing method thereof. The micro-electro-mechanical system includes a comb tooth structure, a spring structure, and an electrode structure. The comb tooth structure includes first comb teeth and second comb teeth arranged alternately. A cantilever beam connecting the second comb teeth is connected to the spring structure; line widths of a first comb tooth and a second comb tooth are 3-7 microns, and are not less than a distance between the adjacent first comb tooth and the second comb tooth a ratio of the length of the first comb tooth to a length of the second comb tooth is 0.7-1.5, a width of the cantilever beam is not less than the line width of the second comb tooth, and thickness of the first comb tooth and a thickness of the second comb tooth are both 300 nanometers to 500 microns.

Abstract: The present disclosure provides a thin film sensor and a manufacturing method thereof, and belongs to the technical field of sensors. The thin film sensor of the present disclosure has a plurality of conductive-wire regions intersecting each other, and a plurality of hollow-out parts defined by the plurality of conductive-wire regions; the thin film sensor includes: a base substrate; a plurality of conductive wires on the base substrate, with the conductive wires being in the conductive-wire regions one to one; and a functional structure on the base substrate, where the functional structure is configured to allow at least part of light, which is transmitted along a preset direction and enters the functional structure from the conductive wire-regions, to exit from the hollow-out parts, and the preset direction is a direction from the base substrate towards the conductive wires.

Abstract: Disclosed are a hollow hydrogel suture for bidirectional liquid delivery and sensing communication, and preparation methods thereof, which belong to the technical field of biomedicine. The hollow hydrogel suture includes a hydrogel suture body and a compound with a sensing communication function doped in the hydrogel suture body, wherein the compound with the sensing communication function is at least one of polypyrrole and copper-doped zinc sulfide, and the hydrogel suture body is made of polyvinyl alcohol.

Abstract: A MEMS switch, a preparation method thereof, and an electronic apparatus. The MEMS switch includes: a substrate, a coplanar waveguide line structure disposed on a side of the substrate, an isolation structure disposed on a side of the coplanar waveguide line structure away from the substrate, a film bridge disposed on a side of the isolation structure away from the substrate. The coplanar waveguide line structure includes a first wire, a first DC bias line, a second wire, a second DC bias line and a third wire arranged at intervals sequentially. The second wire is one of an RF signal transmission line and a ground line, the first wire and the third wire are the other of the RF signal transmission line and the ground line. The film bridge is crossed between the first wire and third wire, and is connected with the first wire and the third wire respectively.

Abstract: A method for preparing a sensing device is provided, the method includes: forming, on a surface of a transparent substrate, a first auxiliary patterning layer having a trench; and forming a mesh structure in the trench of the first auxiliary patterning layer by means of an electroplating process, or forming a conductive layer in the trench of the first auxiliary patterning layer by means of an electroplating process and then etching the conductive layer to form a mesh structure. The mesh structure has a line width of less than or equal to 1.5 microns and a thickness of greater than or equal to 2 microns.

Abstract: The disclosure provides a micro-electromechanical system switch and a communication device. The micro-electromechanical system switch includes: a substrate; a DC bias line, arranged on one side of the substrate; a first signal transmission line and a second signal transmission line, arranged on the same side of the substrate as the DC bias line; a cantilever beam, arranged on a side, away from the substrate, of a layer on which the first signal transmission line is located; and a fixing structure, arranged on the side, away from the substrate, of the layer on which the first signal transmission line is located and not in contact with the first signal transmission line, where the fixing structure connects the free end and the substrate.

Abstract: Provides are a phase shifter and a communication apparatus. The phase shifter includes a substrate; a signal transmission line on one side of the substrate; a first ground wire and a second ground wire on the same side of the substrate as the signal transmission line, the first and second ground wires are on two sides of the signal transmission line; and capacitance bridges on one side away from the substrate, of a layer where the signal transmission line is, the capacitance bridges are connected with the first and second ground wires, the capacitance bridges span the signal transmission line and are sequentially arrayed in an extension direction of signal transmission line, there is a gap between the capacitance bridges and the signal transmission line in a direction perpendicular to substrate, critical bias voltages are different when capacitance between the capacitance bridges and the signal transmission line reaches the maximum.

Abstract: An antenna unit, a manufacturing method thereof, a display device, and an electronic apparatus. The antenna unit includes a radiation main body, at least one feed line, and a plurality of grounding portions. The at least one feed line and the radiation main body are electrically connected, the radiation main body, the at least one feed line, and the plurality of grounding portions are provided in a same layer.

Abstract: An antenna, a display substrate and a display device are provided in the present disclosure, wherein the antenna includes a first conductive layer (11), a dielectric layer (12) and a second conductive layer (13) which are stacked; the first conductive layer (11) is provided with at least one slot (111); the second conductive layer (13) includes at least one conductive structure (130), the conductive structure (130) is a comb structure, the conductive structure (130) includes a first conductive element (131) and a plurality of second conductive elements (132), the first conductive element (131) constitutes a comb back of the comb structure, and the plurality of second conductive elements (132) constitute comb teeth of the comb structure; at least one conductive structure (130) is disposed corresponding to at least one slot (111).

Abstract: The present disclosure provides an ultrasonic transducer unit and a manufacturing method thereof. The ultrasonic transducer unit includes a substrate, a first electrode arranged on the substrate, an insulating layer arranged on the first electrode, a vibrating film arranged on the insulating layer, a closed cavity being between the vibrating film and the insulating layer, and a second electrode arranged on the vibrating film. The vibrating film is made of a photoresist. The ultrasonic transducer unit disclosed by the present disclosure adopts the photoresist as a material of the insulating layer and/or the vibrating film, so that the ultrasonic transducer unit with better performance can be obtained.

Abstract: A linewidth measurement method and apparatus, a computing and processing device, a computer program and a computer readable medium are provided for measuring a width of a line.

Abstract: An antenna unit, a manufacturing method thereof, a display device, and an electronic apparatus. The antenna unit includes a radiation main body, at least one feed line, and a plurality of grounding portions. The at least one feed line and the radiation main body are electrically connected, the radiation main body, the at least one feed line, and the plurality of grounding portions are provided in a same layer.

Abstract: The present disclosure provides a metal wire and a method for manufacturing the same. The method for manufacturing the metal wire includes: forming a metal bar on a substrate; forming a mask above the metal bar, a width of the mask being smaller than a width of the metal bar, and an orthographic projection of the mask on the substrate is within an orthographic projection of the metal bar on the substrate; and wet etching the metal bar to a saturation state under a protection of the mask to form a metal wire, a width of the metal wire being smaller than the width of the mask. The above method can form the metal wire with a high thickness and a narrow line width.

Abstract: A display substrate includes a base substrate, a voltage line arranged at a peripheral region of the base substrate, an encapsulation layer arranged at a side of the voltage line away from the base substrate, and a plurality of pixel units arranged at a display region of the base substrate. The encapsulation layer is arranged at a part of the display region and the peripheral region of the base substrate. The display substrate further includes an antenna arranged at a side of the encapsulation layer away from the base substrate, the antenna is a grid-like antenna, the voltage line is provided with a hollowed-out portion, and an orthogonal projection of at least a part of an end of the antenna onto the base substrate is located within an orthogonal projection of the hollowed-out portion onto the base substrate.

Abstract: A detection substrate and a ray detector are disclosed. The detection substrate includes a base substrate; a plurality of detection pixel circuits, located on the base substrate; a first passivation layer, located on the side, facing away from the base substrate, of the detection pixel circuits; a planarization layer, located on the side, facing away from the base substrate, of the first passivation layer, where the surface of the side, facing away from the first passivation layer, of the planarization layer is a plane; and a plurality of photosensitive devices; where the photosensitive devices are electrically connected to the detection pixel circuits in a one-to-one correspondence through vias penetrating through the first passivation layer and the planarization layer, and each photosensitive device includes a first portion and a second portion.