Abstract: A method of fabricating a semiconductor device is provided. A substrate is provided. The substrate includes a first region, a second region and a third region. An isolation structure is formed on the substrate in the first and the second region. A removing process is performed to remove the isolation structure in the first region, so as to form a first opening exposing a top surface of the substrate. A gate structure is formed on the substrate, covering a part of the substrate in the first region and a part of the isolation structure in the second region. A first doped region of a first conductive type is formed at one side of the gate structure in the first region, and a second doped region of the first conductive type is formed in the substrate in the third region.

Abstract: A silicon carbide (SiC) semiconductor element includes a semiconductor layer, a dielectric layer on a surface of the semiconductor layer, a gate electrode layer on the dielectric layer, a first doped region, a second doped region, a shallow doped region and a third doped region. The semiconductor layer is of a first conductivity type. The first doped region is of a second conductivity type and includes an upper doping boundary spaced from the surface by a first depth. The shallow doped region is of the second conductivity type, and extends from the surface to a shallow doped depth. The second doped region is adjacent to the shallow doped region and is at least partially in the first doped region. The third doped region is of the second conductivity type and at least partially overlaps the first doped region.

Abstract: A wide bandgap semiconductor device with an adjustable voltage level includes a wide bandgap semiconductor power unit and a level adjusting unit. The wide bandgap semiconductor power unit includes a source terminal, to which the level adjusting unit is electrically connected. The level adjusting unit provides a level shift voltage via the source terminal to adjust a driving voltage level of the wide bandgap semiconductor power unit. By adjusting the driving voltage level of the wide bandgap semiconductor power unit using the level adjusting unit, the wide bandgap semiconductor device may serve as a high-voltage enhancement-mode transistor to achieve reduced costs and an increased switching speed.

Abstract: A silicon carbide (SiC) semiconductor element includes a semiconductor layer, a dielectric layer on a surface of the semiconductor layer, a gate electrode layer on the dielectric layer, a first doped region, a second doped region, a shallow doped region and a third doped region. The semiconductor layer is of a first conductivity type. The first doped region is of a second conductivity type and includes an upper doping boundary spaced from the surface by a first depth. The shallow doped region is of the second conductivity type, and extends from the surface to a shallow doped depth. The second doped region is adjacent to the shallow doped region and is at least partially in the first doped region. The third doped region is of the second conductivity type and at least partially overlaps the first doped region.

Abstract: A silicon carbide semiconductor device and method of manufacture thereof is made by providing a channel control zone which has impurity concentration distribution increased gradually from a first doping boundary to reach a maximum value between the first doping boundary and a second doping boundary, then decreased gradually toward the second doping boundary, so that the silicon carbide semiconductor device is formed with a lower conduction resistance and increased drain current without sacrificing threshold voltage.

Abstract: A silicon carbide semiconductor device and method of manufacture thereof is made by providing a channel control zone which has impurity concentration distribution increased gradually from a first doping boundary to reach a maximum value between the first doping boundary and a second doping boundary, then decreased gradually toward the second doping boundary, so that the silicon carbide semiconductor device is formed with a lower conduction resistance and increased drain current without sacrificing threshold voltage.

Abstract: A method of fabricating a semiconductor device is provided. A substrate is provided. The substrate includes a first region, a second region and a third region. An isolation structure is formed on the substrate in the first and the second region. A removing process is performed to remove the isolation structure in the first region, so as to form a first opening exposing a top surface of the substrate. A gate structure is formed on the substrate, covering a part of the substrate in the first region and a part of the isolation structure in the second region. A first doped region of a first conductive type is formed at one side of the gate structure in the first region, and a second doped region of the first conductive type is formed in the substrate in the third region.

Abstract: A fuse circuit includes a plurality of fuses, a plurality of switches and a plurality of trimming components. The fuses are coupled in parallel to a first node and a second node. The first node is coupled to an operating voltage. The switches are coupled to the second node. The trimming components are respectively disposed between the switches and a ground voltage, and coupled to the second node via the switches, respectively. When one of the trimming components is activated, the activated trimming component allows a plurality of branch currents to be generated between the first node and the second node. The branch currents respectively flow through the fuses so that one of the fuses is blown out by the branch current flowing through the one of the fuses.

Abstract: A fuse circuit includes a plurality of fuses, a plurality of switches and a plurality of trimming components. The fuses are coupled in parallel to a first node and a second node. The first node is coupled to an operating voltage. The switches are coupled to the second node. The trimming components are respectively disposed between the switches and a ground voltage, and coupled to the second node via the switches, respectively. When one of the trimming components is activated, the activated trimming component allows a plurality of branch currents to be generated between the first node and the second node. The branch currents respectively flow through the fuses so that one of the fuses is blown out by the branch current flowing through the one of the fuses.

Abstract: A method for removing residual flux applied to a wafer process is disclosed by the present invention, the method comprises the steps of: providing a wafer; forming a plurality of bumps on the surface of the wafer; coating flux on the surfaces of the bumps; reflowing the bumps; immersing the wafer in a cleaning solvent; cleaning the wafer by a plasma descum cleaning; rinsing the wafer; and drying the wafer.