Abstract: The present disclosure relates to exclusion rings for use in processing a semiconductor substrate in a processing chamber, such as a chemical vapor deposition chamber. The exclusion ring includes an alignment structure that cooperates with an alignment structure on a platen on which the exclusion ring will rest during processing of the wafer. The first alignment structure includes a guiding surface which promotes the reception of and positioning of the second alignment structure within the first alignment structure. Methods of utilizing the described exclusion rings are also described.

Abstract: The present disclosure is directed to workpiece support for supporting a workpiece during semiconductor processing. The workpiece support includes one or more support frame bodies including a plurality of spaced apart spacers on a first surface of the support frame bodies. The spacers include a first surface spaced apart from the first surface of the support frame body. The spacing between the first surface of the spacers and the first surface of the support frame body results in the underside of the workpiece contacting the spacers but not contacting the first surface of the support frame body. Portions of the underside of the workpiece that do not contact the first surface of the support frame body are less susceptible to damage or accumulation of unwanted debris.

Abstract: The present disclosure relates to exclusion rings for use in processing a semiconductor substrate in a processing chamber, such as a chemical vapor deposition chamber. The exclusion ring includes an alignment structure that cooperates with an alignment structure on a platen on which the exclusion ring will rest during processing of the wafer. The first alignment structure includes a guiding surface which promotes the reception of and positioning of the second alignment structure within the first alignment structure. Methods of utilizing the described exclusion rings are also described.

Abstract: The present disclosure relates to a method of chemical vapor deposition (CVD). In some embodiments, a process gas is applied into a vacuum chamber. The process gas is guided downstream the vacuum chamber through a shower head arranged under the gas import, where the process gas is redirected to be laterally unevenly distributed under the shower head. A density of the process gas increases from a center region to a peripheral region of the vacuum chamber. The process gas is then deposited onto a first substrate to form a precursor material with an uneven thickness profile as a result of uneven distribution of the process gas. The shower head has multiple control zones each having a plurality of holes disposed through the shower head.

Abstract: The present disclosure relates to a chemical vapor deposition apparatus and associated methods. In some embodiments, the CVD apparatus has a vacuum chamber and a gas import having a gas import axis through which a process gas is imported into the vacuum chamber and being arranged near an upper region of the vacuum chamber. At least one exhaust port is arranged near a bottom region of the vacuum chamber. The CVD apparatus also has a shower head arranged under the gas import having a plurality of holes formed there through. The shower head redistributes the process gas to form a precursor material with an uneven thickness that matches a remove profile of a subsequent CMP process. As a result, planarity of the formed layer after the CMP process is improved.

Abstract: The present disclosure relates to a method of chemical vapor deposition (CVD). In some embodiments, a process gas is applied into a vacuum chamber. The process gas is guided downstream the vacuum chamber through a shower head arranged under the gas import, where the process gas is redirected to be laterally unevenly distributed under the shower head. A density of the process gas increases from a center region to a peripheral region of the vacuum chamber. The process gas is then deposited onto a first substrate to form a precursor material with an uneven thickness profile as a result of uneven distribution of the process gas. The shower head has multiple control zones each having a plurality of holes disposed through the shower head.

Abstract: The present disclosure relates to a chemical vapor deposition apparatus and associated methods. In some embodiments, the CVD apparatus has a vacuum chamber and a gas import having a gas import axis through which a process gas is imported into the vacuum chamber and being arranged near an upper region of the vacuum chamber. At least one exhaust port is arranged near a bottom region of the vacuum chamber. The CVD apparatus also has a shower head arranged under the gas import having a plurality of holes formed there through. The shower head redistributes the process gas to form a precursor material with an uneven thickness that matches a remove profile of a subsequent CMP process. As a result, planarity of the formed layer after the CMP process is improved.

Abstract: The present disclosure relates to a chemical vapor deposition apparatus and associated methods. In some embodiments, the CVD apparatus has a vacuum chamber and a gas import having a gas import axis through which a process gas is imported into the vacuum chamber and being arranged near an upper region of the vacuum chamber. At least one exhaust port is arranged near a bottom region of the vacuum chamber. The CVD apparatus also has a shower head arranged under the gas import having a plurality of holes formed there through with at least two different diameters or densities. The shower head redistributes the process gas to form a precursor material with an uneven thickness that matches a remove profile of a subsequent CMP process. As a result, planarity of the formed layer after the CMP process is improved.

Abstract: The present disclosure relates to a chemical vapor deposition apparatus and associated methods. In some embodiments, the CVD apparatus has a vacuum chamber and a gas import having a gas import axis through which a process gas is imported into the vacuum chamber and being arranged near an upper region of the vacuum chamber. At least one exhaust port is arranged near a bottom region of the vacuum chamber. The CVD apparatus also has a shower head arranged under the gas import having a plurality of holes formed there through with at least two different diameters or densities. The shower head redistributes the process gas to form a precursor material with an uneven thickness that matches a remove profile of a subsequent CMP process. As a result, planarity of the formed layer after the CMP process is improved.

Abstract: An electromagnetic detection device is provided. The electromagnetic detection device includes an induction coil, a converter, and a controller. The induction coil is utilized to sense an RF signal and generate a sensing RF signal by electromagnetic induction of the induction coil which is proportional to the RF signal. The RF signal is transmitted to a shower head to perform a semiconductor process on a wafer for manufacturing an IC in association with the RF signal. The converter is utilized to convert the sensing RF signal into a DC signal. The controller is utilized to determine whether the semiconductor process is normal or abnormal according to the DC signal during the semiconductor process. The semiconductor process will be terminated when the semiconductor process is determined as abnormal.

Abstract: A method to indicate that a first device is in communication with a second device is disclosed. The first device may receive an indication activity from the second device. The indication activity may change the display and the illumination object on the first device and the displays on the illumination object and the display are similar.

Abstract: Techniques and tools are described that relate to different aspects of a user interface in which visual distortion effects are presented to provide visual cues to a user to indicate a location in a movable data collection (e.g., a scrollable list, an email message, a content layer, etc.). For example, in response to a user gesture on a touchscreen, a user interface system presents a portion of a list or layer in a visually distorted state, such as a “squished,” squeezed or compressed state in which text, images or other content is shown to be smaller than normal in one or more dimensions, to indicate to a user that the end of a list has been reached.

Abstract: Dynamic icons are described that can employ animations, such as visual effects, audio, and other content that change with time. If multiple animations are scheduled to occur simultaneously, the timing of the animations can be controlled so that timing overlap of the animations is reduced. For example, the starting times of the animations can be staggered so that multiple animations are not initiated too close in time. It has been found that too much motion in the user interface can be distracting and cause confusion amongst users.

Abstract: Disclosed herein are tools and techniques for using a single-finger single touch to zoom content. In one embodiment disclosed herein, a single-finger single touch on a touch screen displaying at least a page of content is detected. At least in response to the detecting the single-finger single touch, a page zoom is performed.

Abstract: A pointer tool in a touch-screen display is disclosed. The method includes activating a pointer tool in a touch screen display in response to contact with an area of the touch screen and persisting the displaying of the pointer tool in the touch screen display after the contact with the touch screen is removed. Once editing data is received, the pointer tool is removed from the touch screen display.

Abstract: Various technologies for managing mobile device communications can be offered to implement a virtual personal operator. Incoming calls and texts can be managed intelligently based on a rich network-stored context, allowing the network to make decisions and interact with callers. Because context is stored by the network, the virtual personal operator can function without contacting the called mobile phone, and can even provide helpful information to callers if the mobile phone is offline. Rich do-not-disturb functionality can be provided, and privileged callers can be given additional information or functionality based on their privileged status. Numerous other features that assist with communications management can be supported.

Abstract: Dynamic icons are described that can employ animations, such as visual effects, audio, and other content that change with time. If multiple animations are scheduled to occur simultaneously, the timing of the animations can be controlled so that timing overlap of the animations is reduced. For example, the starting times of the animations can be staggered so that multiple animations are not initiated too close in time. It has been found that too much motion in the user interface can be distracting and cause confusion amongst users.

Abstract: Techniques and tools are described for rendering views of a map in which map metadata elements are layered in 3D space through which a viewer navigates. Layering of metadata elements such as text labels in 3D space facilitates parallax and smooth motion effects for zoom-in, zoom-out and scrolling operations during map navigation. A computing device can determine a viewer position that is associated with a view altitude in 3D space, then render for display a map view based upon the viewer position and metadata elements layered at different metadata altitudes in 3D space. For example, the computing device places text labels in 3D space above features associated with the respective labels, at the metadata altitudes indicated for the respective labels. The computing device creates a map view from points of the placed labels and points of a surface layer of the map that are visible from the viewer position.

Abstract: A method to indicate that a first device is in communication with a second device is disclosed. The first device may receive an indication activity from the second device. The indication activity may change the display and the illumination object on the first device and the displays on the illumination object and the display are similar.

Abstract: A user interface is described that temporarily displays portions of a page that reside outside of the viewable area of the screen. An animated transition creates a brief preview of at least one user interface feature. Additionally, the user interface feature is then animated out of the viewable area in a way to suggest a location of the feature. In one embodiment, a target page that is being opened controls the transition and animates features into and out of the viewable area to create the temporary preview. In another embodiment, the target page includes user interface elements that can asynchronously control the preview animation independent from the main content of the target page. In yet another embodiment, a transition coordinator can coordinate the timing between animating out a foreground application while animating in a target application.