Patents by Inventor Yaogang Lian

Yaogang Lian has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Determining calibration parameters for a lithographic process
    Patent number: 8849008
    Abstract: A technique for determining a set of calibration parameters for use in a model of a photo-lithographic process is described. In this calibration technique, images of a test pattern that was produced using the photo-lithographic process are used to determine corresponding sets of calibration parameters. These images are associated with at least three different focal planes in an optical system, such as a photo-lithographic system that implements the photo-lithographic process. Moreover, an interpolation function is determined using the sets of calibration parameters. This interpolation function can be used to determine calibration parameters at an arbitrary focal plane in the photo-lithographic system for use in simulations of the photolithographic process, where the set of calibration parameters are used in a set of transmission cross coefficients in the model of the photo-lithographic process.
    Type: Grant
    Filed: September 10, 2012
    Date of Patent: September 30, 2014
    Assignee: Synopsys, Inc.
    Inventors: Xin Zhou, Yaogang Lian, Robert E. Gleason
  • Determining Calibration Parameters For a Lithographic Process
    Publication number: 20130004056
    Abstract: A technique for determining a set of calibration parameters for use in a model of a photo-lithographic process is described. In this calibration technique, images of a test pattern that was produced using the photo-lithographic process are used to determine corresponding sets of calibration parameters. These images are associated with at least three different focal planes in an optical system, such as a photo-lithographic system that implements the photo-lithographic process. Moreover, an interpolation function is determined using the sets of calibration parameters. This interpolation function can be used to determine calibration parameters at an arbitrary focal plane in the photo-lithographic system for use in simulations of the photolithographic process, where the set of calibration parameters are used in a set of transmission cross coefficients in the model of the photo-lithographic process.
    Type: Application
    Filed: September 10, 2012
    Publication date: January 3, 2013
    Applicant: SYNOPSYS, INC.
    Inventors: Xin Zhou, Yaogang Lian, Robert E. Gleason
  • Determining calibration parameters for a lithographic process
    Patent number: 8285030
    Abstract: A technique for determining a set of calibration parameters for use in a model of a photo-lithographic process is described. In this calibration technique, images of a test pattern that was produced using the photo-lithographic process are used to determine corresponding sets of calibration parameters. These images are associated with at least three different focal planes in an optical system, such as a photo-lithographic system that implements the photo-lithographic process. Moreover, an interpolation function is determined using the sets of calibration parameters. This interpolation function can be used to determine calibration parameters at an arbitrary focal plane in the photo-lithographic system for use in simulations of the photo-lithographic process, where the set of calibration parameters are used in a set of transmission cross coefficients in the model of the photo-lithographic process.
    Type: Grant
    Filed: March 15, 2010
    Date of Patent: October 9, 2012
    Assignee: Synopsys, Inc.
    Inventors: Xin Zhou, Yaogang Lian, Robert E. Gleason
  • Determining Calibration Parameters for a Lithographic Process
    Publication number: 20110222739
    Abstract: A technique for determining a set of calibration parameters for use in a model of a photo-lithographic process is described. In this calibration technique, images of a test pattern that was produced using the photo-lithographic process are used to determine corresponding sets of calibration parameters. These images are associated with at least three different focal planes in an optical system, such as a photo-lithographic system that implements the photo-lithographic process. Moreover, an interpolation function is determined using the sets of calibration parameters. This interpolation function can be used to determine calibration parameters at an arbitrary focal plane in the photo-lithographic system for use in simulations of the photo-lithographic process, where the set of calibration parameters are used in a set of transmission cross coefficients in the model of the photo-lithographic process.
    Type: Application
    Filed: March 15, 2010
    Publication date: September 15, 2011
    Inventors: Xin Zhou, Yaogang Lian, Robert E. Gleason