Abstract: There is disclosed a vacuum table 400 comprising a vacuum plate 402 separating a first vacuum chamber 406 from a substrate zone 60 for receiving a substrate 50. The vacuum plate has a plurality of suction holes 404 for conveying a gas flow from the substrate zone 60 to the first vacuum chamber 406. There is an evacuation port 422 in communication with a second vacuum chamber 420 to evacuate gas from the substrate zone 60 when a substrate 50 is received over the suction holes 404 of the vacuum plate 402, and a vacuum port 424 for discharging gas received in the second vacuum chamber 420 to a vacuum source 423. The first vacuum chamber 406 and the second vacuum chamber 420 are in fluid communication via a valve 430 so that gas flows from the first vacuum chamber 406 to the vacuum port 424 via the second vacuum chamber 420. The valve 430 is controllable to vary a gas flow rate through the vacuum plate 402 and thereby vary a retaining force on a substrate 50 received thereon.

Abstract: There is disclosed a vacuum table 400 comprising a vacuum plate 402 separating a first vacuum chamber 406 from a substrate zone 60 for receiving a substrate 50. The vacuum plate has a plurality of suction holes 404 for conveying a gas flow from the substrate zone 60 to the first vacuum chamber 406. There is an evacuation port 422 in communication with a second vacuum chamber 420 to evacuate gas from the substrate zone 60 when a substrate 50 is received over the suction holes 404 of the vacuum plate 402, and a vacuum port 424 for discharging gas received in the second vacuum chamber 420 to a vacuum source 423. The first vacuum chamber 406 and the second vacuum chamber 420 are in fluid communication via a valve 430 so that gas flows from the first vacuum chamber 406 to the vacuum port 424 via the second vacuum chamber 420. The valve 430 is controllable to vary a gas flow rate through the vacuum plate 402 and thereby vary a retaining force on a substrate 50 received thereon.

Abstract: There is disclosed a vacuum table (400) comprising a vacuum plate (402) separating a first vacuum chamber (406) from a substrate zone (60) for receiving a substrate (50). The vacuum plate has a plurality of suction holes (404) for conveying a gas flow from the substrate zone (60) to the first vacuum chamber (406). There is an evacuation port (422) in communication with a second vacuum chamber (420) to evacuate gas from the substrate zone (60) when a substrate (50) is received over the suction holes (404) of the vacuum plate (402), and a vacuum port (424) for discharging gas received in the second vacuum chamber (420) to a vacuum source. The first vacuum chamber (406) and the second vacuum chamber (420) are in fluid communication via a valve (430) so that gas flows from the first vacuum chamber (406) to the vacuum port (424) via the second vacuum chamber (420).

Abstract: An apparatus for separating liquid and gas comprises a first pipe having a gas outlet at an upper first portion thereof and a liquid outlet at a lower second portion thereof. The apparatus further comprises a second pipe extending at least partly along the first pipe and comprising an inlet for a mix of liquid and gas. A plurality of holes fluidically connects an interior of the second pipe to the interior of the first pipe between the first portion and the second portion of the outer pipe.