Patents by Inventor Yaroslava Petraitis

Yaroslava Petraitis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deposition systems and methods
    Patent number: 9822439
    Abstract: A system is disclosed, including a processing chamber for a deposition process; a cathode within the chamber, configured to introduce a sputter gas and a reactive gas adjacent to a target; a substrate holder, disposed opposite the cathode within the processing chamber, configured to secure a substrate to receive a deposition from the target; and a control system configured to monitor a target voltage and to control a flow rate of the reactive gas to maintain the target voltage within a desired range during the deposition process. Methods and devices for deposition processes are also disclosed.
    Type: Grant
    Filed: June 19, 2015
    Date of Patent: November 21, 2017
    Assignee: FLIR Systems, Inc.
    Inventors: Tommy Marx, Richard E. Bornfreund, Yaroslava Petraitis, James L. Dale
  • DEPOSITION SYSTEMS AND METHODS
    Publication number: 20150284838
    Abstract: A system is disclosed, including a processing chamber for a deposition process; a cathode within the chamber, configured to introduce a sputter gas and a reactive gas adjacent to a target; a substrate holder, disposed opposite the cathode within the processing chamber, configured to secure a substrate to receive a deposition from the target; and a control system configured to monitor a target voltage and to control a flow rate of the reactive gas to maintain the target voltage within a desired range during the deposition process. Methods and devices for deposition processes are also disclosed.
    Type: Application
    Filed: June 19, 2015
    Publication date: October 8, 2015
    Inventors: Tommy Marx, Richard E. Bornfreund, Yaroslava Petraitis, James L. Dale
  • Multilayered microbolometer film deposition
    Patent number: 9029783
    Abstract: A microbolometer is disclosed, including a bottom multilayered dielectric, having a first silicon oxynitride layer and a second silicon oxynitride layer disposed above the first silicon oxynitride layer, the first and second silicon oxynitride layers having different refractive indices. The microbolometer further includes a detector layer disposed above the bottom multilayered dielectric, the detector layer comprised of a temperature sensitive resistive material, and a top dielectric disposed above the detector layer.
    Type: Grant
    Filed: June 10, 2011
    Date of Patent: May 12, 2015
    Assignee: FLIR Systems, Inc.
    Inventors: Robert F. Cannata, Yaroslava Petraitis, Patrick Franklin, Robert Simes, Richard E. Bornfreund
  • Microbolometer detector layer
    Patent number: 8502147
    Abstract: A microbolometer is disclosed, including a bottom dielectric of a bridge structure; a detector layer disposed above the bottom dielectric, the detector layer comprised of a metal-doped vanadium pentaoxide material; and a top dielectric disposed above the detector layer.
    Type: Grant
    Filed: October 4, 2011
    Date of Patent: August 6, 2013
    Assignee: Flir Systems, Inc.
    Inventors: Yaroslava Petraitis, Richard E. Bornfreund, Joseph H. Durham, Robert F. Cannata
  • MICROBOLOMETER DETECTOR LAYER
    Publication number: 20130082178
    Abstract: A microbolometer is disclosed, including a bottom dielectric of a bridge structure; a detector layer disposed above the bottom dielectric, the detector layer comprised of a metal-doped vanadium pentaoxide material; and a top dielectric disposed above the detector layer.
    Type: Application
    Filed: October 4, 2011
    Publication date: April 4, 2013
    Applicant: FLIR SYSTEMS, INC.
    Inventors: Yaroslava Petraitis, Richard E. Bornfreund, Joseph H. Durham, Robert F. Cannata
  • MULTILAYERED MICROBOLOMETER FILM DEPOSITION
    Publication number: 20120312992
    Abstract: A microbolometer is disclosed, including a bottom multilayered dielectric, having a first silicon oxynitride layer and a second silicon oxynitride layer disposed above the first silicon oxynitride layer, the first and second silicon oxynitride layers having different refractive indices. The microbolometer further includes a detector layer disposed above the bottom multilayered dielectric, the detector layer comprised of a temperature sensitive resistive material, and a top dielectric disposed above the detector layer.
    Type: Application
    Filed: June 10, 2011
    Publication date: December 13, 2012
    Applicant: FLIR SYSTEMS, INC.
    Inventors: Robert F. Cannata, Yaroslava Petraitis, Patrick Franklin, Robert Simes, Richard E. Bornfreund