Abstract: An LTPS array substrate, a method for manufacturing the same, and a display device are disclosed. According to the method, a flat layer is formed on an electrode. The flat layer is formed through washing, baking to remove water, hydrophobization treatment, photoresist coating, drying in vacuum, pre-baking, exposing, developing, baking, and aching procedures in sequence, and the baking procedure comprises at least baking for twice with different temperatures. According to the method, the organic film of the flat layer can be preliminarily solidified. In this manner, the problem that the taper angle at via hole position is too small, which is resulted from the liquidity of photoresist material of the flat layer, can be solved.

Abstract: An LTPS array substrate, a method for manufacturing the same, and a display device are disclosed. According to the method, a flat layer is formed on an electrode. The flat layer is formed through washing, baking to remove water, hydrophobization treatment, photoresist coating, drying in vacuum, pre-baking, exposing, developing, baking, and aching procedures in sequence, and the baking procedure comprises at least baking for twice with different temperatures. According to the method, the organic film of the flat layer can be preliminarily solidified. In this manner, the problem that the taper angle at via hole position is too small, which is resulted from the liquidity of photoresist material of the flat layer, can be solved.