Patents by Inventor Yasufui Kubota

Yasufui Kubota has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Silicon-containing polymer, resist composition and patterning process
    Publication number: 20020168581
    Abstract: Novel silicon-containing polymers are obtained by copolymerizing a vinylsilane monomer with a compound having a low electron density unsaturated bond such as maleic anhydride, maleimide derivatives or tetrafluoroethylene. Using the polymers, chemical amplification positive resist compositions sensitive to high-energy radiation and having a high sensitivity and resolution at a wavelength of less than 300 nm and improved resistance to oxygen plasma etching are obtained.
    Type: Application
    Filed: March 1, 2002
    Publication date: November 14, 2002
    Applicant: Shin-Etsu Chemical Co., Ltd.
    Inventors: Takanobu Takeda, Jun Hatakeyama, Toshinobu Ishihara, Tohru Kubota, Yasufui Kubota