Patents by Inventor Yasuharu Matsumura

Yasuharu Matsumura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20110266139
    Abstract: The present invention provides a film forming apparatus that forms a film on a substrate (s) 1 being conveyed continuously in a vacuum chamber 7 under supply of a gas, wherein two film forming regions 14a and 14b can be readily supplied with a uniformly flowing gas simultaneously, and the film can be formed efficiently with high uniformity in film quality.
    Type: Application
    Filed: June 2, 2011
    Publication date: November 3, 2011
    Applicant: CANON ANELVA CORPORATION
    Inventor: Yasuharu Matsumura
  • Publication number: 20110064877
    Abstract: To provide a gas supply device 20 which can supply a gas uniformly even if an overall length of a gas supply pipe 21 is long and can secure uniformity in film quality. The gas supply device 20 is provided with a gas supply pipe 21 which is configured of a double-layer pipe comprising an inner pipe 23 connected to a gas introduction pipe 22 and an outer pipe 24 for covering the outer peripheral portion of the inner pipe 23 with a gap between them, wherein the inner pipe 23 has a porous sintered body 25 for allowing the passage of the gas in at least a part of it; and the outer pipe 24 has a large number of gas outlet ports 26 for discharging the gas having passed through the sintered body 25 into the vacuum vessel.
    Type: Application
    Filed: December 24, 2009
    Publication date: March 17, 2011
    Applicant: CANON ANELVA CORPORATION
    Inventors: Yasuharu Matsumura, Takayuki Moriwaki
  • Patent number: 4871513
    Abstract: An aqueous solution containing 0.00005 to 0.2 mol/l of copper ion and 0.0001 to 1.0 mol/l of nitrate ion is effective to detect phosphorus segregates in a metallic material, particularly cast steel. Segregated phosphorus can be detected by etching a surface of steel to be tested, attaching test paper onto the steel surface, applying the aqueous solution to the paper, maintaining the paper in contact with the steel surface until stains appear, and removing the paper from the steel surface. A red print is obtained when the solution is pH 6 or higher. A blue print is obtained by following the above steps, and further treating the paper with a color reagent containing molybdate ion, and then with a reducing agent.
    Type: Grant
    Filed: June 12, 1987
    Date of Patent: October 3, 1989
    Assignee: Kawasaki Steel Corporation
    Inventors: Yoshiko Funahashi, Yoshikazu Kamino, Yasuharu Matsumura, Senichi Harimaya
  • Patent number: 4718992
    Abstract: An aqueous electrolytic solution of a molybdate ion and an oxidizing agent is effective to detect phosphorus segregates in a metallic material, particularly cast steel through electrolysis. Segregated phosphorus can be detected by (a) applying a test sheet against a surface area of the metallic material to be examined for segregation, (b) introducing an aqueous electrolytic solution comprising 0.1 to 20% by weight of a molybdate ion and an oxidizing agent between the metallic material surface area and the sheet, (c) contacting a cathode plate with the sheet, (d) effecting electrolysis with the metallic material made anode, (e) removing the sheet from the metallic material surface, and (f) treating the sheet with a reducing agent.
    Type: Grant
    Filed: August 19, 1986
    Date of Patent: January 12, 1988
    Assignees: Kawasaki Steel Corporation, Kawasaki Steel Techno-Research Corporation
    Inventors: Yoshiko Funahashi, Yoshikazu Kamino, Yasuharu Matsumura, Senichi Harimaya
  • Patent number: 4696795
    Abstract: A sheet impregnated with an aqueous solution of silver nitrate is effective to detect phosphorus segregates in a metallic material, particularly cast steel. Segregated phosphorus can be detected by etching a surface of steel to be tested, attaching test paper onto the steel surface, applying an aqueous solution of 0.1 to 80% by weight of silver nitrate to the test paper, maintaining the test paper in contact with the steel surface for a sufficient time, removing the test paper from the steel surface, and subjecting the test paper to fixing treatment.
    Type: Grant
    Filed: October 10, 1985
    Date of Patent: September 29, 1987
    Assignee: Kawasaki Steel Corporation
    Inventors: Yoshiko Funahashi, Yoshikazu Kamino, Yasuharu Matsumura, Senichi Harimaya
  • Patent number: 4696906
    Abstract: An aqueous solution of 0.1-80% silver nitrate is effective to detect phosphrous segregates in a metallic material, particularly cast steel. Segregated phosphorus can be detected by etching a surface of steel to be tested, attaching test paper onto the steel surface, applying an aqueous solution of 0.1 to 80% by weight of silver nitrate to the paper, maintaining the paper in contact with the steel surface for a sufficient time, removing the paper from the steel surface, and subjecting the paper to fixing treatment. The solution may further comprise an amount of lower alkyl alcohol that is compatible with the silver nitrate in solution.
    Type: Grant
    Filed: October 10, 1985
    Date of Patent: September 29, 1987
    Assignee: Kawasaki Steel Corporation
    Inventors: Yoshiko Funahashi, Yoshikazu Kamino, Yasuharu Matsumura, Senichi Harimaya
  • Patent number: 4681857
    Abstract: An aqueous solution containing 0.00005 to 0.2 mol/l of copper ion and 0.0001 to 1.0 mol/l of nitrate ion is effective to detect phosphorus segregates in a metallic material, particularly cast steel. Segregated phosphorus can be detected by etching a surface of steel to be tested, attaching test paper onto the steel surface, applying the aqueous solution to the paper, maintaining the paper in contact with the steel surface until stains appear, and removing the paper from the steel surface. A red print is obtained when the solution is pH 6 or higher. A blue print is obtained by following the above steps, and further treating the paper with a color reagent containing molybdate ion, and then with a reducing agent.
    Type: Grant
    Filed: August 13, 1985
    Date of Patent: July 21, 1987
    Assignee: Kawasaki Steel Corporation
    Inventors: Yoshiko Funahashi, Yoshikazu Kamino, Yasuharu Matsumura, Senichi Harimaya
  • Patent number: 4643979
    Abstract: Phosphorus segregates formed in cast steel upon solidifying are detected by a novel method comprising applying a metal etching reagent, for example, lithium chloride in ethanol, to a surface area of the steel to be examined, and attaching a sheet of test paper bearing an aqueous solution of silver nitrate to said surface, thereby detecting phosphorus segregates as stains on the sheet.
    Type: Grant
    Filed: November 13, 1984
    Date of Patent: February 17, 1987
    Assignee: Kawasaki Steel Corporation
    Inventors: Yoshiko Funahashi, Yasuharu Matsumura, Senichi Harimaya, Yoshikazu Kamino, Hidenari Kitaoka
  • Patent number: 4643978
    Abstract: An aqueous solution of silver nitrate is effective to detect phosphorus segregates in a metallic material, particularly cast steel. Segregated phosphorus can be detected by etching a surface of steel to be tested, attaching test paper onto the steel surface, applying an aqueous solution of 0.1 to 80% by weight of silver nitrate to the paper, maintaining the paper in contact with the steel surface for a sufficient time, removing the paper from the steel surface, and subjecting the paper to fixing treatment.
    Type: Grant
    Filed: November 13, 1984
    Date of Patent: February 17, 1987
    Assignee: Kawasaki Steel Corporation
    Inventors: Yoshiko Funahashi, Yoshikazu Kamino, Yasuharu Matsumura, Senichi Harimaya