Abstract: A plasma processing apparatus includes a chamber; a wall member; an insulating member; and a ground member. The wall member is partially placed in an internal space of the chamber and exposed to a space at an outside of the chamber. The insulating member is provided on the wall member. The ground member is made of silicon, provided in the internal space and mounted on the insulating member. The wall member is configured to support the ground member in a non-contact state with the insulating member therebetween. The ground member is in contact with a spherical surface of the insulating member and mounted on the spherical surface.

Abstract: A motor includes a commutator, a brush, a first spring, a second spring, and a holder. The brush is configured to come into contact with the commutator to be electrically connected to the commutator. The first spring is configured to push the brush along the first direction toward the commutator. The second spring pushes the brush along a second direction intersecting the first direction. The holder is disposed such that the brush is located between the holder and the second spring in the second direction. The holder holds the brush between the holder and the second spring.

Abstract: A motor includes a frame in the shape of a bottomed cylinder, a stator housed in the frame, a rotor, an end plate for closing an opening of the frame, and bearings rotatably supporting a rotary shaft of the rotor. The frame has, on its bottom, a bearing holder at the center and ribs extending like rays from the bearing holder radially outward and protruding to the inside of the frame. Each rib has a radially outer end reaching a circumferential wall of the frame.

Abstract: A motor includes a commutator, a brush, a first spring, a second spring, and a holder. The brush is configured to come into contact with the commutator to be electrically connected to the commutator. The first spring is configured to push the brush along the first direction toward the commutator. The second spring pushes the brush along a second direction intersecting the first direction. The holder is disposed such that the brush is located between the holder and the second spring in the second direction. The holder holds the brush between the holder and the second spring.

Abstract: A motor includes a frame in the shape of a bottomed cylinder, a stator housed in the frame, a rotor, an end plate for closing an opening of the frame, and bearings rotatably supporting a rotary shaft of the rotor. The frame has, on its bottom, a bearing holder at the center and ribs extending like rays from the bearing holder radially outward and protruding to the inside of the frame. Each rib has a radially outer end reaching a circumferential wall of the frame.

Abstract: This brush holder assembly includes: a brush holder formed in a disk shape by molding of insulating resin, and including a pair of box fixing sections each including a groove formed from an outer peripheral side toward inside: and brush box assemblies each having a brush box which houses a brush therein, each of the brush box assemblies being disposed in the box fixing section. Each of the brush box assemblies is formed of box-like metal, and has a plurality of mounting legs. Additionally, each of the box fixing sections of the brush holder has a plurality of mounting holes. In this brush holder assembly, these mounting legs are inserted into the respective mounting holes, and the brush box assembly is fixed. Furthermore, in the brush holder assembly of the present invention, the brush holder assemblies face the brush holder through gaps. Additionally, a commutator motor of the present invention includes the above brush holder assembly.

Abstract: A motor which includes: inner ring having upper end surface, outer ring, and balls between inner ring and outer ring. Pressurizing spring, into which rotary shaft is inserted, is located between core and bearing, and provides bias forces in the axial direction of rotary shaft. Outer ring is pressed to fit into bearing holding part. Inner ring is fitted onto rotary shaft with gap therebetween. Upper end surface of inner ring is in contact with pressurizing spring. Pressurizing spring applies the bias forces of different strengths onto a surface in which upper end surface contacts with pressurizing spring, along a circumferential direction with the axial direction as a center.

Abstract: This brush holder assembly includes: a brush holder formed in a disk shape by molding of insulating resin, and including a pair of box fixing sections each including a groove formed from an outer peripheral side toward inside: and brush box assemblies each having a brush box which houses a brush therein, each of the brush box assemblies being disposed in the box fixing section. Each of the brush box assemblies is formed of box-like metal, and has a plurality of mounting legs. Additionally, each of the box fixing sections of the brush holder has a plurality of mounting holes. In this brush holder assembly, these mounting legs are inserted into the respective mounting holes, and the brush box assembly is fixed. Furthermore, in the brush holder assembly of the present invention, the brush holder assemblies face the brush holder through gaps. Additionally, a commutator motor of the present invention includes the above brush holder assembly.

Abstract: A motor which includes: inner ring having upper end surface, outer ring, and balls between inner ring and outer ring. Pressurizing spring, into which rotary shaft is inserted, is located between core and bearing, and provides bias forces in the axial direction of rotary shaft. Outer ring is pressed to fit into bearing holding part. Inner ring is fitted onto rotary shaft with gap therebetween. Upper end surface of inner ring is in contact with pressurizing spring. Pressurizing spring applies the bias forces of different strengths onto a surface in which upper end surface contacts with pressurizing spring, along a circumferential direction with the axial direction as a center.

Abstract: A dc motor includes a stator having multiple field magnet poles, and an armature having an armature core, armature coils, and a commutator, and brushes brought into contact with the commutator. The armature coils include concentrated winding coil units wound on respective teeth, and connecting wire units that electrically connect each of the concentrated winding coil units together. A segment group of the commutator includes a first segment and a second segment placed adjacent to each other, to which the concentrated winding coil units are connected, the segment group also includes a third segment disposed next to the adjacent placement, and only the connecting wire unit is connected to the third segment. The connecting wire units include connecting wire units that pass through slots and connect each of the concentrated winding coil units together.

Abstract: A commutator motor is configured such that an armature includes an armature core having teeth and slots, an armature coil, and a commutator having segments. The armature coil includes coil units in which windings are wound on the teeth, and jumper wire units for interconnecting between the coil units. Segment group includes first and second segments to which the coil units are connected, and a third segment to which only the jumper wire unit is connected. The first and second segments are disposed adjacent to each other, and the third segment is disposed next to the adjacent arrangement. The configuration includes the jumper wire unit that is wired from the third segment such that each of one part of the wire unit running to one side and the other part of the wire unit running to the other side is wired to pass through the same slot to interconnect between the coil units.

Abstract: A commutator motor is configured such that an armature includes an armature core having teeth and slots, an armature coil, and a commutator having segments. The armature coil includes coil units in which windings are wound on the teeth, and jumper wire units for interconnecting between the coil units. Segment group includes first and second segments to which the coil units are connected, and a third segment to which only the jumper wire unit is connected. The first and second segments are disposed adjacent to each other, and the third segment is disposed next to the adjacent arrangement. The configuration includes the jumper wire unit that is wired from the third segment such that each of one part of the wire unit running to one side and the other part of the wire unit running to the other side is wired to pass through the same slot to interconnect between the coil units.

Abstract: A dc motor includes a stator having multiple field magnet poles, and an armature having an armature core, armature coils, and a commutator, and brushes brought into contact with the commutator. The armature coils include concentrated winding coil units wound on respective teeth, and connecting wire units that electrically connect each of the concentrated winding coil units together. A segment group of the commutator includes a first segment and a second segment placed adjacently to each other, to which the concentrated winding coil units are connected, the segment group also includes a third segment disposed next to the adjacent placement, and only the connecting wire unit is connected to the third segment. The connecting wire units include connecting wire units that pass through slots and connect each of the concentrated winding coil units together.