Abstract: According to one embodiment, a spiral coating apparatus includes: a stage; a nozzle; a movement unit; a gas supply unit; a cleaning liquid supply unit; and a nozzle cleaner. The stage has a placement surface. The nozzle is configured to dispense a liquid onto a coating object placed on the stage. The movement unit is configured to move the nozzle relative to the stage. The gas supply unit is configured to supply a gas. The cleaning liquid supply unit is configured to supply a cleaning liquid. The nozzle cleaner has a gas supply port and a cleaning liquid supply port. The nozzle cleaner is configured to force the gas supplied by the gas supply unit from the gas supply port toward the nozzle and dispense the cleaning liquid supplied by the cleaning liquid supply unit from the cleaning liquid supply port toward the nozzle.

Abstract: According to an embodiment, a method for forming a film, the film including a first portion provided on a substrate and a second portion provided along an outer edge of the first portion, and surrounding the first portion, includes a step of forming the second portion by spraying liquid drops on the substrate, each of the liquid drops containing material of the second portion. The method also includes a step of forming the first portion by spraying other liquid drops on a region in the substrate, the region being surrounded by the second portion, and each of the other liquid drops containing material of the first portion.