Patents by Inventor Yasuhiko Sugiyama

Yasuhiko Sugiyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Focused ion beam optical axis adjustment method and focused ion beam apparatus
    Patent number: 5917186
    Abstract: To provide a focused ion beam optical axis alignment method and a focused ion beam apparatus which make axis alignment work of for example when replacing an ion source of a focused ion beam apparatus easy.
    Type: Grant
    Filed: September 9, 1997
    Date of Patent: June 29, 1999
    Assignee: Seiko Instruments Inc.
    Inventors: Toshiaki Fujii, Yasuhiko Sugiyama
  • Focused ion beam apparatus
    Patent number: 5438197
    Abstract: A focussed ion-beam apparatus, to realize the simultaneous observation of both the brighter area and the darker area on the sample, which are generated because of the difference in the generation efficiency of the secondary charged particle due to the ion-beam irradiation. According to the result in the comparison of the output signal from the secondary charged particle detector with the reference voltage, to optimize the signal above as the input signal for the image display. To realize the simultaneous observation of both the brighter area and the darker area of the sample.
    Type: Grant
    Filed: July 11, 1994
    Date of Patent: August 1, 1995
    Assignee: Seiko Instruments Inc.
    Inventors: Toshiaki Fujii, Yasuhiko Sugiyama