Patents by Inventor Yasuhiko Tsukanaka

Yasuhiko Tsukanaka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Conditioning method and conditioning apparatus for polishing pad for use in double side polishing device
    Patent number: 8579679
    Abstract: The present invention provides an apparatus capable of uniformly grinding an polishing pad. Further, the present invention provides a method of grinding an polishing pad by using the grinding apparatus.
    Type: Grant
    Filed: September 13, 2010
    Date of Patent: November 12, 2013
    Assignee: Sumco Corporation
    Inventors: Hiroto Fukushima, Tomonori Miura, Yasuhiko Tsukanaka, Takeshi Ezaki
  • GRINDING METHOD AND GRINDING APPARATUS FOR POLISHING PAD FOR USE IN DOUBLE-SIDE POLISHING DEVICE
    Publication number: 20110065365
    Abstract: The present invention provides an apparatus capable of uniformly grinding an polishing pad. Further, the present invention provides a method of grinding an polishing pad by using the grinding apparatus.
    Type: Application
    Filed: September 13, 2010
    Publication date: March 17, 2011
    Applicants: SUMCO CORPORATION, SUMITOMO METAL FINE TECHNOLOGY CO., LTD.
    Inventors: Hiroto Fukushima, Tomonori Miura, Yasuhiko Tsukanaka, Takeshi Ezaki