Patents by Inventor Yasuhiro Ichige

Yasuhiro Ichige has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing liquid for metal and polishing method
    Patent number: 10037894
    Abstract: The present invention relates to a metal polishing liquid for polishing at least a part of metal in a substrate having the metal, comprising, component A: a metal solubilizer containing amino acids, component B: compounds having the benzotriazole skeleton, and component C: an acrylic acid polymer having the weight average molecular weight of 10,000 or more, and having the mass ratio between the component B and the component C, (component B:component C), to be 1:1 to 1:5. Use of the metal polishing liquid can simultaneously yield high polishing rates and low etching rates at higher level, enabling to form an embedded pattern with higher reliability.
    Type: Grant
    Filed: January 29, 2013
    Date of Patent: July 31, 2018
    Assignee: HITACHI CHEMICAL COMPANY, LTD.
    Inventors: Yasuhiro Ichige, Kouji Haga, Seiichi Kondo
  • POLISHING LIQUID FOR METAL AND POLISHING METHOD
    Publication number: 20140370707
    Abstract: The present invention relates to a metal polishing liquid for polishing at least a part of metal in a substrate having the metal, comprising, component A: a metal solubilizer containing amino acids, component B: compounds having the benzotriazole skeleton, and component C: an acrylic acid polymer having the weight average molecular weight of 10,000 or more, and having the mass ratio between the component B and the component C, (component B:component C), to be 1:1 to 1:5. Use of the metal polishing liquid can simultaneously yield high polishing rates and low etching rates at higher level, enabling to form an embedded pattern with higher reliability.
    Type: Application
    Filed: January 29, 2013
    Publication date: December 18, 2014
    Inventors: Yasuhiro Ichige, Kouji Haga, Seiichi Kondo