Patents by Inventor Yasuhiro Kishikawa
Yasuhiro Kishikawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9164370Abstract: An exposure apparatus which exposes a substrate coated with a photoresist to form a latent image to the photoresist, comprises an original holding unit configured to hold an original including a phase-modulation diffraction grating so that an interference pattern is formed on a surface of the substrate by a light beam diffracted by the original, a substrate holding unit configured to hold the substrate, and a light beam dividing optical system configured to divide a light beam to form a plurality of light beams which enter the original, wherein a latent image is formed on the substrate by superposition of a plurality of interference patterns formed on the surface of the substrate, the plurality of interference patterns respectively corresponding to the plurality of light beams which enter the original.Type: GrantFiled: April 3, 2009Date of Patent: October 20, 2015Assignee: Canon Kabushiki KaishaInventors: Yasuhiro Kishikawa, Tokuyuki Honda, Seiji Takeuchi
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Patent number: 7733461Abstract: An exposure apparatus includes an illumination optical system for illuminating a reticle with exposure light, a projection optical system for projecting a pattern of the reticle onto a plate via a liquid supplied to a space between the projection optical system and the plate, a supply pipe for supplying the liquid to the space, a recovery pipe for recovering the liquid from the space, and a measuring unit for measuring a refractive index of the liquid.Type: GrantFiled: June 23, 2006Date of Patent: June 8, 2010Assignee: Canon Kabushiki KaishaInventor: Yasuhiro Kishikawa
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Publication number: 20090257039Abstract: An exposure apparatus which exposes a substrate coated with a photoresist to form a latent image to the photoresist, comprises an original holding unit configured to hold an original including a phase-modulation diffraction grating so that an interference pattern is formed on a surface of the substrate by a light beam diffracted by the original, a substrate holding unit configured to hold the substrate, and a light beam dividing optical system configured to divide a light beam to form a plurality of light beams which enter the original, wherein a latent image is formed on the substrate by superposition of a plurality of interference patterns formed on the surface of the substrate, the plurality of interference patterns respectively corresponding to the plurality of light beams which enter the original.Type: ApplicationFiled: April 3, 2009Publication date: October 15, 2009Applicant: CANON KABUSHIKI KAISHAInventors: Yasuhiro Kishikawa, Tokuyuki Honda, Seiji Takeuchi
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Patent number: 7286226Abstract: Disclosed is a birefringence measuring apparatus and method for measuring birefringence of a sample in a reduced time and in a simple manner. The birefringence measuring apparatus includes a light projecting unit for projecting approximately circularly polarized light upon a sample, a Stokes meter for detecting a state of polarization of light from the sample, and a calculating system for calculating birefringence of the sample on the basis of a Stokes parameter from the Stokes meter.Type: GrantFiled: December 12, 2003Date of Patent: October 23, 2007Assignee: Canon Kabushiki KaishaInventors: Seiji Takeuchi, Yasuhiro Kishikawa
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Patent number: 7251029Abstract: A birefringence measurement apparatus for calculating information of polarization of light emitted from an object to be measured includes a light source, a first polarization element for extracting a beam in a specific polarization direction from light emitted from the light source, a sample stage that holds an object to be measured, at least one beam splitting unit that splits the light emitted from the object into two beams having the same polarization as that of the light emitted from the object, at least two second polarization elements for extracting beams in a specific polarization direction of the light split by the beam splitting unit, at least two light-quantity detectors for detecting light quantity of beams that have transmitted through the second polarization element, and an operation part for operating a light quantity received by the light-quantity detectors.Type: GrantFiled: June 30, 2003Date of Patent: July 31, 2007Assignee: Canon Kabushiki KaishaInventors: Yasuhiro Kishikawa, Seiji Takeuchi
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Patent number: 7180051Abstract: A polarization state detecting system includes a first dividing device for dividing incident light into two light beams having the same polarization state as that of the incident light, a detector for detecting one of the two light beams from the first dividing device, through a polarizer, and an acquisition device for acquiring information regarding the polarization state of the incident light on the basis of an output of the detector. The first dividing device includes a first element, a second element and a third element. The second element is disposed so that a p-polarization component reflected by the first element is reflected by the second element as an s-polarization component.Type: GrantFiled: October 25, 2005Date of Patent: February 20, 2007Assignee: Canon Kabushiki KaishaInventors: Seiji Takeuchi, Yasuhiro Kishikawa
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Patent number: 7161675Abstract: A beam splitting apparatus generates, from incident light having a specific polarization, first and second split light that has the specific polarization.Type: GrantFiled: June 8, 2004Date of Patent: January 9, 2007Assignee: Canon Kabushiki KaishaInventors: Yasuhiro Kishikawa, Seiji Takeuchi
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Publication number: 20060290912Abstract: An exposure apparatus includes an illumination optical system for illuminating a reticle with an exposure light, a projection optical system for projecting a pattern of the reticle onto a plate via a liquid supplied to a space between the projection optical system and the plate, and a measuring unit for measuring a refractive index of the liquid, wherein the measuring unit includes a light source for generating a measurement light having the same wavelength as that of the exposure light, a liquid reservoir for storing the liquid, the liquid reservoir having a transmitting surface for transmitting the measurement light and a reflecting surface for reflecting the measurement light, and a detector for detecting the measurement light via the liquid reservoir.Type: ApplicationFiled: June 23, 2006Publication date: December 28, 2006Applicant: CANON KABUSHIKI KAISHAInventor: Yasuhiro Kishikawa
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Patent number: 7095497Abstract: A beam splitting apparatus generates, from incident light having a specific polarization, first and second split light that has the specific polarization.Type: GrantFiled: June 25, 2002Date of Patent: August 22, 2006Assignee: Canon Kabushiki KaishaInventors: Yasuhiro Kishikawa, Seiji Takeuchi
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Patent number: 7015456Abstract: A polarization state detecting system includes a first dividing device for dividing incident light into two light beams having the same polarization state as the incident light, a detector for detecting one of the two light beams from the first dividing device, through a polarizer, and an acquisition device for acquiring information regarding the polarization state of the incident light on the basis of an output of the detector. The first dividing device includes a first element, a second element and a third element. The second element is disposed so that a p-polarization component reflected by the first element is reflected by the second element as an s-polarization component.Type: GrantFiled: May 6, 2003Date of Patent: March 21, 2006Assignee: Canon Kabushiki KaishaInventors: Seiji Takeuchi, Yasuhiro Kishikawa
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Publication number: 20060033019Abstract: A polarization state detecting system includes a first dividing device for dividing incident light into two light beams having the same polarization state as that of the incident light, a detector for detecting one of the two light beams from the first dividing device, through a polarizer, and an acquisition device for acquiring information regarding the polarization state of the incident light on the basis of an output of the detector. The first dividing device includes a first element, a second element and a third element. The second element is disposed so that a p-polarization component reflected by the first element is reflected by the second element as an s-polarization component.Type: ApplicationFiled: October 25, 2005Publication date: February 16, 2006Applicant: CANON KABUSHIKI KAISHAInventors: Seiji Takeuchi, Yasuhiro Kishikawa
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Patent number: 6992763Abstract: A beam splitting apparatus generates, from incident light having a specific polarization, first and second split light that has the specific polarization.Type: GrantFiled: June 8, 2004Date of Patent: January 31, 2006Assignee: Canon Kabushiki KaishaInventors: Yasuhiro Kishikawa, Seiji Takeuchi
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Publication number: 20050185155Abstract: An exposure apparatus includes a projection optical system for projecting a pattern of a reticle onto an object to be exposed, via a fluid that is at least partially filled in a space between the projection optical system and the object, and an adding unit for adding an additive to the fluid, the additive exhibiting an oxidation effect to an organic matter.Type: ApplicationFiled: February 18, 2005Publication date: August 25, 2005Inventor: Yasuhiro Kishikawa
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Publication number: 20040223228Abstract: A beam splitting apparatus generates, from incident light having a specific polarization, first and second split light that has the specific polarization.Type: ApplicationFiled: June 8, 2004Publication date: November 11, 2004Inventors: Yasuhiro Kishikawa, Seiji Takeuchi
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Publication number: 20040223443Abstract: A beam splitting apparatus generates, from incident light having a specific polarization, first and second split light that has the specific polarization.Type: ApplicationFiled: June 8, 2004Publication date: November 11, 2004Inventors: Yasuhiro Kishikawa, Seiji Takeuchi
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Publication number: 20040156051Abstract: Disclosed is a birefringence measuring apparatus and method for measuring birefringence of a sample in a reduced time and in a simple manner. The birefringence measuring apparatus includes a light projecting unit for projecting approximately circularly polarized light upon a sample, a Stokes meter for detecting a state of polarization of light from the sample, and a calculating system for calculating birefringence of the sample on the basis of a Stokes parameter from the Stokes meter.Type: ApplicationFiled: December 12, 2003Publication date: August 12, 2004Applicant: Canon Kabushiki KaishaInventors: Seiji Takeuchi, Yasuhiro Kishikawa
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Publication number: 20040008348Abstract: A birefringence measurement apparatus for calculating information of polarization of light emitted from an object to be measured includes a light source, a first polarization element for extracting a beam in a specific polarization direction from light emitted from the light source, a sample stage that holds an object to be measured, at least one beam splitting unit that splits the light emitted from the object into two beams having the same polarization as that of the light emitted from the object, at least two second polarization elements for extracting beams in a specific polarization direction of the light split by the beam splitting unit, at least two light-quantity detectors for detecting light quantity of beams that have transmitted through the second polarization element, and an operation part for operating a light quantity received by the light-quantity detectors.Type: ApplicationFiled: June 30, 2003Publication date: January 15, 2004Inventors: Yasuhiro Kishikawa, Seiji Takeuchi
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Publication number: 20030234348Abstract: In a detecting system for detecting polarization state of light or a Stokes meter for detecting Stokes parameters, the polarization state can be detected with a compact structure or in a shortened measurement time. The detecting system uses a first divider for dividing incident light into two light beams having the same polarization state as the incident light, a detector for detecting one of the two light beams from the first divider, through a polarizer, and an acquisition unit for acquiring information regarding the polarization state of the incident light on the basis of an output of the detector.Type: ApplicationFiled: May 6, 2003Publication date: December 25, 2003Applicant: Canon Kabushiki KaishaInventors: Seiji Takeuchi, Yasuhiro Kishikawa
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Publication number: 20030043376Abstract: A beam splitting apparatus generates, from incident light having a specific polarization, first and second split light that has the specific polarization.Type: ApplicationFiled: June 25, 2002Publication date: March 6, 2003Inventors: Yasuhiro Kishikawa, Seiji Takeuchi