Abstract: The related-art medical treatment instrument had one or more of various problems such as aging degradation of a microwave radiation switch and coagulation unevenness. It has been confirmed that the configuration of the medical treatment instrument according to the present invention solves the one or more of the problems described above, and the present invention has been completed.

Abstract: An apparatus for manufacturing or inspecting semiconductors comprising a main body, an opening arranged in the main body, and a safety door. The safety door includes a first door element for covering a first portion of the opening and a second door element for covering a second portion of the opening, the first door element having a movement direction along which the first door element is driven by a driving device, the second door element being urged toward the first door element along the movement direction of the first door element by an external force. If a part of a person's body should be caught between the first and second door elements, the second door element is urged against the external force by the force generated by the part of the person's body to protect the part of the person's body.

Abstract: A mechanism for tilting a microscope in which a tilting base 5 is supported by a tilting sub-base 4 at three points, and is urged toward the tilting sub-base at all times by the resilient force of initially coned disc springs 23 fitted to support bolts 20. Adjusting bolts 30 are used for the support at three points, and steel balls 34 are interposed between the lower parts of the bolts and the tilting sub-base, so that the tilting base is supported by the tilting sub-base.

Abstract: In a robot hand of an automatic handling robot for holding and carrying a semiconductor wafer or the like, the robot hand 10 itself is made of a porous material, for example, porous ceramic, and the surface portion thereof other than portions corresponding to a wafer suction portion 13 and a suction air intake 14 is coated with a film which does not permit the passage of air, for example, fluorocarbon resin or the like. Air can pass through the porous portion.