Abstract: A lithography apparatus has a plurality of driving units each of which drives in synchronization within a specific period, a power source for supplying power required for driving to each driving unit, a plurality of capacitors capable of charging power from the power source, a plurality of switching units for switching whether or not power is supplied from the power source to the driving units and capacitors, and a controller configured to stop supplying the power to the driving units and the capacitors and to drive the driving unit with the power charged in the capacitor, in at least a part of a period of driving in synchronization concerning at least one of the plurality of the driving units, or in at least a part of a period of driving in asynchronization concerning another driving unit different from at least one of the driving unit.

Abstract: A lithography apparatus has a plurality of driving units each of which drives in synchronization within a specific period, a power source for supplying power required for driving to each driving unit, a plurality of capacitors capable of charging power from the power source, a plurality of switching units for switching whether or not power is supplied from the power source to the driving units and capacitors, and a controller configured to stop supplying the power to the driving units and the capacitors and to drive the driving unit with the power charged in the capacitor, in at least a part of a period of driving in synchronization concerning at least one of the plurality of the driving units, or in at least a part of a period of driving in asynchronization concerning another driving unit different from at least one of the driving unit.

Abstract: A driving apparatus electrically drives first and second components built in an industrial instrument. The first component drives a first element, and the second component drives a second element at a velocity higher than that of the first component. The driving apparatus includes a housing including a supply inlet and an exhaust outlet. A fan forms an air current so that air is taken into the housing through the supply inlet and is exhausted from inside the housing through the exhaust outlet. A driving circuit block is accommodated in the housing so as to be cooled by the air current, and includes a first driving circuit to electrically drive the first component, and a second driving circuit to electrically drive the second component. The second driving circuit is inserted upstream of the first driving circuit along the air current in the housing.

Abstract: A driving apparatus which electrically drives a component built in an industrial instrument, comprises a housing including a supply inlet and an exhaust outlet, a fan configured to form an air current so that air is taken into the housing through the supply inlet and exhausted from inside the housing through the exhaust outlet, a driving circuit block which is accommodated in the housing so as to be cooled by the air current, and configured to electrically drive the component, and a cooling unit configured to regulate a temperature of the air exhausted from inside the housing through the exhaust outlet so as to decrease a temperature difference between the air taken into the housing through the supply inlet and the air exhausted from inside the housing through the exhaust outlet.

Abstract: A fuel injector includes a valve seat member formed with a valve seat and a valve element including an abutting portion to abut on an abutting portion of the valve seat. One of the abutting portions of the valve seat and the valve element includes a surface layer which is softened by heat treatment, and which is pressed by abutment between the valve seat and the valve element.