Abstract: The printing apparatus of the present invention comprises a scanner unit for reading an image in an original; an instruction unit for receiving an instruction from a user and instructing operation of reading the image with the scanner unit; and a printer unit for printing the image that has been read on a medium. In the printing apparatus of the present invention, each reading operations with the scanner unit is started by receiving an instruction from the user with the instruction unit when the reading operation is to be performed with the scanner unit for a plurality of number of times and a plurality of the images that have been read are to be printed in their respective predetermined positions on the medium. The printing apparatus makes it possible to perform N-up printing of a new procedure that is different from conventional N-up printing.

Abstract: A network relay device compliant with network plug-and-play protocols is presented. The relay device relays messages between a network and a device unit having N service devices that provide a service in response to a request from a client on the network. In one embodiment the relay device has a description creating module configured to create a device description which describes service devices included in the device unit connected to the relay device. If one or more service devices of the device unit are inoperative, the description creating module creates a device description that does not include a description portion of the inoperative service devices and forwards the created device description to the client. In another embodiment, the relay device has a response module configured to respond to a device search request sent from a client.

Abstract: In a processing apparatus, a process gas including a source gas (TiCl4, NH3) and an inert gas (N2) is supplied into a process chamber (2). A pressure meter (6) detects a pressure in the process chamber (2) so as to control an amount of flow of the process gas supplied to the process chamber (2) based on a result of the detection. A source gas is purged by the inert gas. By maintaining the amount of flow of the source gas constant and controlling the amount of flow of the inert gas, an amount of flow the entire process gas is controlled so as to maintain a pressure in the process chamber (2) constant. Since a time spent on evacuation of the source gas is reduced, a time for switching the source gas is reduced. Additionally, a temperature of a surface of a substrate during processing can be maintained constant.

Abstract: A light source device is formed by a plasma formation chamber including a plasma formation region where plasma is formed by electrodeless discharge to generate light and an optical window defining the lower end of the plasma region in the plasma formation chamber and transmitting the light. A microwave transmitting window is formed in the plasma chamber for introducing microwaves for generating the plasma. Furthermore, outside of the microwave transmitting window, a microwave antenna is connected to the microwave window for introducing the microwaves.

Abstract: The present invention is a film forming method for an SiOCH film, comprising a unit-film-forming step including: a deposition step of depositing an SiOCH film element by using an organic silicon compound as a raw material and by using a plasma CVD method; and a hydrogen plasma processing step of providing a hydrogen plasma process to the deposited SiOCH film element, wherein the unit-film-forming step is repeated several times so as to form an SiOCH film on a substrate.

Abstract: The printer 10 includes a user interface UI and a PC interface PIF that register specification information that specifies necessary status information, as well as a status management module DSM that, when status information regarding which the specification information is registered is changed, supplies the changed status information to the interface that carried out the registration of such information.

Abstract: There is provided a method for forming a porous dielectric film stably by: forming a surface densification layer by processing a surface of an SiOCH film formed by a plasma CVD process while using an organic silicon compound source; and releasing CHx groups or OH group from the SiOCH film underneath the surface densification layer by hydrogen plasma processing through the surface densification layer with a controlled rate.

Abstract: A method of forming a low-K dielectric film, comprises the steps of placing a substrate carrying thereon a low-K dielectric film on a stage, heating the low-K dielectric film on the stage, processing the low-K dielectric film by plasma of a processing gas containing a hydrogen gas, the plasma being excited while supplying the processing gas over the low-K dielectric film, wherein the plasma is excited within 90 seconds after placing the substrate upon the stage.

Abstract: The printing apparatus of the present invention comprises a scanner unit for reading an image in an original; an instruction unit for receiving an instruction from a user and instructing operation of reading the image with the scanner unit; and a printer unit for printing the image that has been read on a medium. In the printing apparatus of the present invention, each reading operation' with the scanner unit is started by receiving an instruction from the user with the instruction unit when the reading operation is to be performed with the scanner unit for a plurality of number of times and a plurality of the images that have been read are to be printed in their respective predetermined positions on the medium. The printing apparatus makes it possible to perform N-up printing of a new procedure that is different from conventional N-up printing.

Abstract: A method of rapidly forming a thin film of high quality through film formation by alternate feeding of raw gases. In particular, a method of forming a TiN thin film, comprising repeating operations including causing TiCl4 gas as a raw gas to be adsorbed on a substrate or TiCl4 molecules adsorbed on a substrate and feeding NH3 gas as a reactant gas in a treating chamber so as to effect reaction of TiCl4 and NH3 leading to formation of a TiN film, which method further comprises an operation of, prior to the adsorption of TiCl4 gas on the substrate, feeding reducing H2 gas in the treating chamber (30) so as to change TiCl4 to a state of enhanced likelihood of adsorption on the substrate (e.g., TiCl3).

Abstract: An image output device of the invention includes an XHTML analyzer module 22 that analyzes each input XHTML file and generates RGB data, a conversion unit 30 that converts the RGB data into CMYK print data, and a print execution module 34 that transfers the print data to a print head to execute printing. The image output device receives input of an object image from any of a digital television set 50, a digital camera 52, and a personal computer 54 and acquires data representing the format of the input object image. The image output device identifies the format of the input object image based on the acquired data and assigns an adequate one for the identified format among the XHTML analyzer module 22, the conversion unit 30, and the print execution module 34 to process the input object image. This arrangement assigns the processing of the input object image, based on the identified format (type) of the input object image, and thus enables the input object image to be processed efficiently for printing.

Abstract: An order data obtaining device displays a list of components on a Web page, and recognizes components selected on the Web page, thereby obtaining order data of a product that is formed of a plurality of components. A turnaround time display control device obtains turn-around time information of each of the components selected on the Web page, and displays on the Web page the longest turn-around time in the turn-around time information as a turn-around time of the product. An accurate turn-around time is calculated in accordance with the selection of components, and a customer is immediately notified of the accurate turn-around time of the product. Thus, loss of competitiveness in the market due to display of a turn-around time being fixed and too long because of its inclusion of leeway is prevented.

Abstract: Diverse initiator modules, member modules, and terminator modules are provided to actualize various functionalities of a printer in various combinations of these modules. A data processing path controller DPC arranges a sequence of plural modules to execute a selected printing process. Each module is not informed of the structures of the other modules in combination or the details of the processing executed by the other modules. Each module that allows a relevant module to read data therefrom and each module that allows a relevant module to write data therein are designed to respectively have a specific function for the data reading and a specific function for the data writing. In response to a call from the data processing path controller DPC, these modules transfer pointers of the corresponding functions to the individual relevant modules and accordingly allow the individual relevant modules to read data therefrom and write data therein.

Abstract: An order data obtaining device displays a list of components on a Web page, and recognizes components selected on the Web page, thereby obtaining order data of a product that is formed of a plurality of components. A turnaround time display control device obtains turn-around time information of each of the components selected on the Web page, and displays on the Web page the longest turn-around time in the turn-around time information as a turn-around time of the product. An accurate turn-around time is calculated in accordance with the selection of components, and a customer is immediately notified of the accurate turn-around time of the product. Thus, loss of competitiveness in the market due to display of a turn-around time being fixed and too long because of its inclusion of leeway is prevented.

Abstract: A network relay device, which is compliant with network plug-and-play, is used for relaying between a network and a device unit having one or more service devices that provide a service in response to a request from a client on the network. The network relay device includes a data conversion module that, upon receiving from a client a print request message describing in markup language an image for printing, converts the print request message to data for use by the device unit and supplies the converted data to the device unit. The data conversion module creates, as the data for use by the device unit, printer data according to a universal standard acceptable by the device unit.

Abstract: A network relay device compliant with network plug-and-play protocols is presented. The relay device relays messages between a network and a device unit having N service devices that provide a service in response to a request from a client on the network. In one embodiment the relay device has a description creating module configured to create a device description which describes service devices included in the device unit connected to the relay device. If one or more service devices of the device unit are inoperative, the description creating module creates a device description that does not include a description portion of the inoperative service devices and forwards the created device description to the client. In another embodiment, the relay device has a response module configured to respond to a device search request sent from a client.

Abstract: In a processing apparatus which performs a film deposition by alternately supplying a plurality of source gases, the source gases are prevented from reacting within an exhaust pipe so as to prevent the exhaust pipe from clogging due to a reaction by-product. A gas supply to a processing container is switched between a TiCl4 supply system and a NH3 supply system. Additionally, a gas exhaust from the processing container is switched between a TiCl4 exhaust system and a NH3 exhaust system. The gas exhaust is switched to the TiCl4 exhaust system when the gas supply is switched to the TiCl4 supply system, and the gas exhaust is switched to the NH3 exhaust system when the gas supply is switched to the NH3 supply system. The switching is performed by a stop valve provided to each of the supply system and the exhaust system.

Abstract: That surface of an electrode plate 20 which is opposite to a susceptor 10 has a projection shape. The electrode plate 20 is fitted in an opening 26a of shield ring 26 at a projection 20a. At this time, die thickness of the projection 20a is approximately the same as the thickness of the shield ring 26. Accordingly, the electrode plate 20 and the shield ring 26 form substantially the same plane. The major surface of the projection 20a has a diameter 1.2 to 1.5 times the diameter of a wafer W. The electrode plate 20 is formed of, for example, SiC.

Abstract: In a state of the inside of a treatment chamber of treatment equipment being evacuated, therein a cleaning gas containing trifluoroacetic acid (TFA) as a cleaning agent is supplied. Metal such as copper used in the formation of an interconnection or an electrode and stuck on an inner wall surface of the treatment chamber, when coming into contact with the cleaning agent (TFA) in the cleaning gas, without forming an oxide or a metallic salt, is directly complexed. The complex is sublimed due to the evacuation and is exhausted outside the treatment chamber. Accordingly, at less labor and low cost, the cleaning can be efficiently implemented.

Abstract: A network device includes a network protocol controller and a device controller. The device controller controls a plurality of service devices including a first device, and a second device of different type from the first device. The network protocol controller and the device controller are connected by a packetized logical channel for the first device. The network protocol controller, upon having received a message in the network plug-and-play protocol and destined for the second device, transfers the content of the message body of the received message to the device controller, using the logical channel for the first device.